Andreas Heberer
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | April 1, 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Spectroscopy, Silicon, Etching, Near infrared, Diffraction gratings, Diodes, Semiconducting wafers, Signal processing, Mirrors, Monochromators

PROCEEDINGS ARTICLE | February 7, 2007
Proc. SPIE. 6489, Projection Displays XII
KEYWORDS: Laser sources, Mirrors, Sensors, Scanners, Silicon, Semiconductor lasers, Projection systems, Microopto electromechanical systems, Gyroscopes, Projection devices

PROCEEDINGS ARTICLE | January 22, 2007
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Oxides, Mirrors, Etching, Spectroscopy, Silicon, Control systems, Scanning electron microscopy, Signal processing, Diodes, Diffraction gratings

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Diffraction, Mirrors, Etching, Spectroscopy, Silicon, Micromirrors, Aluminum, Wet etching, Anisotropic etching, Diffraction gratings

PROCEEDINGS ARTICLE | November 8, 2005
Proc. SPIE. 5996, Optical Sensors and Sensing Systems for Natural Resources and Food Safety and Quality
KEYWORDS: Optical components, Mirrors, Digital signal processing, Agriculture, Sensors, Spectroscopy, Spectrometers, Silicon, Signal processing, Microopto electromechanical systems

PROCEEDINGS ARTICLE | October 15, 2005
Proc. SPIE. 5964, Detectors and Associated Signal Processing II
KEYWORDS: Infrared sensors, Near infrared, Mirrors, Digital signal processing, Light emitting diodes, Sensors, Spectroscopy, Signal processing, Microopto electromechanical systems, LED displays

Showing 5 of 9 publications
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