Reducing production time at high precision is key target for applying short pulse laser ablation technologies in the growing market of die and mould manufacturing. Required precision accuracy for laser ablation in this market is a dimensional resolution of IT 6, which means only ±4 μm deviation in reference to specified dimensions of 3mm. Dedicated investigations of different short pulse laser ablation systems (lamp and diode pumped Nd:YAG and diode pumped end pumped Nd:YVO4) indicate that cavities produced by these lasers can not match described specifications of precision. The process capability of standard industrial laser systems is insufficient. In this paper a model is introduced which describes the lateral accuracy of three dimensional mould cavities in dependency of pulse crater dimensions and their positioning accuracy. These influences were transferred to the statistical variance of following parameters: laser beam peak power and accuracy of scanner positioning. The stationary solution of the model indicates that pulse peak power stability according to known first pulse phenomena becomes a dominant influence in first order approximation. In second order approximation the infeed offset determines the dimensional lateral accuracy of cavities.