Prof. Andreas Ostendorf Profile

Prof. Andreas Ostendorf

Full Professor at Ruhr-Univ Bochum

SPIE Involvement:

| Membership & Communities Committee | Symposia Committee | Fellow status | Conference Program Committee | Conference Chair | Editor | Author | Student Chapter Advisor

Area of Expertise:

Micromachining , Nanostructuring , Optical scattering , Nanoparticles , Microoptical Resonators , 2-Photon Polymerization

Websites:

Company Website

Profile Summary

The research activities of Prof. Ostendorf are based on micro- and nanosystems and structures. Using ultrafast lasers opens the window for generating structures beyond the diffraction limit. Also, micro- and nanoparticles are investigated with respect to their optical properties (e.g. scattering, resonances, manipulation by optical tweezers). Exploring the resonances in microparticles can lead to completly new types of sensors. Finally, nanoparticles are generated by laser ablation and their material properties are investigated.

Publications (113)

SPIE Conference Volume | July 2, 2018

Nanophotonics VII

PROCEEDINGS ARTICLE | May 24, 2018

Mapping of the detecting units of the resonator-based multiplexed sensor

Proc. SPIE. 10678, Optical Micro- and Nanometrology VII

KEYWORDS: Edge detection, Biosensing, Resonators, Sensors, Multiplexing, Image enhancement

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PROCEEDINGS ARTICLE | February 22, 2018

Printing structural colors via direct laser writing

Proc. SPIE. 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI

KEYWORDS: Multilayers, Biophotonic applications, Two photon polymerization, Optical properties, Polymers, Organisms, Printing, Biomimetics, Disordered photonic crystals

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PROCEEDINGS ARTICLE | February 20, 2018

Evaluation and benchmarking of an EC-QCL-based mid-infrared spectrometer for monitoring metabolic blood parameters in critical care units

Proc. SPIE. 10501, Optical Diagnostics and Sensing XVIII: Toward Point-of-Care Diagnostics

KEYWORDS: Mid-IR, FT-IR spectroscopy, Glucose, Calibration, Blood, Spectroscopy, Quantum cascade lasers, Infrared spectroscopy, Infrared radiation

Read Abstract +

SPIE Journal Paper | December 14, 2017

Quantification of whispering gallery mode spectrum variability in application to sensing nanobiophotonics

Anton Saetchnikov, Victor Skakun, Vladimir Saetchnikov, Elina Tcherniavskaia, Andreas Ostendorf

JNP Vol. 11 Issue 04

KEYWORDS: Resonators, Denoising, Biosensing, Signal to noise ratio, Nanobiophotonics, Sensors, Computer simulations, Data analysis, Wavelets, Environmental sensing

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SPIE Journal Paper | October 31, 2017

Optical assembly of microsnap-fits fabricated by two-photon polymerization

Jannis Köhler, Yunus Kutlu, Gordon Zyla, Sarah Ksouri, Cemal Esen, Evgeny Gurevich, Andreas Ostendorf

OE Vol. 56 Issue 10

KEYWORDS: Two photon polymerization, Optical fabrication, Microsystems, Optical tweezers, Scanning electron microscopy, Photosensitive materials, Spherical lenses, Polymers, Optical engineering, Holography

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PROCEEDINGS ARTICLE | August 30, 2017

Graphene oxide reduction induced by femtosecond laser irradiation

Proc. SPIE. 10356, Nanostructured Thin Films X

Read Abstract +

PROCEEDINGS ARTICLE | June 26, 2017

Simultaneous real-time application and direct comparison of optical resonance sensing and fluorescence tagging techniques for biochemical component detection

Proc. SPIE. 10333, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials III

KEYWORDS: Optical filters, Microfluidics, Proteins, Optical sensing, Resonators, Sensors, Luminescence, Quantum dots, Biological research, Signal detection

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PROCEEDINGS ARTICLE | February 27, 2017

Development and characterization of a microsnap-fit for optical assembly

Proc. SPIE. 10120, Complex Light and Optical Forces XI

KEYWORDS: Holography, Microsystems, Two photon polymerization, Polymers, Manufacturing, Robotics, Optical fabrication, Photoresist materials, Optical tweezers, Microfabrication, Spherical lenses, Optics manufacturing

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PROCEEDINGS ARTICLE | February 17, 2017

Influence of solvent mixture on the ablation rate of iron using femtosecond laser pulses

Proc. SPIE. 10092, Laser-based Micro- and Nanoprocessing XI

KEYWORDS: Ultrafast phenomena, Femtosecond phenomena, Iron, Interferometers, Nanoparticles, Laser processing, Materials processing, Bioalcohols, Control systems, Laser ablation, Laser cutting, Liquids

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SPIE Conference Volume | June 22, 2016

Nanophotonics VI

PROCEEDINGS ARTICLE | May 4, 2016

Recognition of pharmaceuticals with compact mini-Raman-spectrometer and automized pattern recognition algorithms

Proc. SPIE. 9899, Optical Sensing and Detection IV

KEYWORDS: Magnesium, Principal component analysis, Detection and tracking algorithms, Visualization, Pattern recognition, Spectroscopy, Spectroscopy, Spectrometers, Raman spectroscopy, Raman spectroscopy, Ocean optics, Data processing

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PROCEEDINGS ARTICLE | April 22, 2016

Influence of the sensitivity of an optical resonator with a surface layer by its properties

Proc. SPIE. 9727, Laser Resonators, Microresonators, and Beam Control XVIII

KEYWORDS: Refractive index, Microresonators, Optical spheres, Resonators, Particles, Refraction, Optical resonators, Bismuth, Geometrical optics, Phase shifts

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PROCEEDINGS ARTICLE | April 19, 2016

Long-term functionalization of optical resonance sensor spots

Proc. SPIE. 9884, Nanophotonics VI

KEYWORDS: Gold, Plasmonics, Potassium, Proteins, Magnesium, Biomedical optics, Two photon polymerization, Resonators, Sensors, Nanoparticles, 3D printing, Biological research, Adhesives, Optical microcavities, Biological weapons

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PROCEEDINGS ARTICLE | March 4, 2016

Optical screw-wrench for interlocking 2PP-microstructures

Proc. SPIE. 9764, Complex Light and Optical Forces X

KEYWORDS: Microscopes, Holography, Microsystems, Two photon polymerization, Nanoparticles, Complex systems, Manufacturing, Scanning electron microscopy, Buildings, Spatial light modulators, Optical tweezers, Optics manufacturing, 3D microstructuring

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PROCEEDINGS ARTICLE | March 4, 2016

Throughput optimization for laser micro structuring

Proc. SPIE. 9736, Laser-based Micro- and Nanoprocessing X

KEYWORDS: Ultrafast phenomena, Femtosecond phenomena, Metals, Laser energy, Particles, Copper, Dielectrics, Laser processing, Materials processing, Resistance, Laser ablation, Thermal effects, Micromachining, Pulsed laser operation, Laser systems engineering

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PROCEEDINGS ARTICLE | March 4, 2016

Performance testing of a mid-infrared spectroscopic system for clinical chemistry applications utilising an ultra-broadband tunable EC-QCL radiation source

Proc. SPIE. 9715, Optical Diagnostics and Sensing XVI: Toward Point-of-Care Diagnostics

KEYWORDS: Mid-IR, Mirrors, Glucose, Sensors, Spectroscopy, Quantum cascade lasers, Absorbance, Pulsed laser operation, Factor analysis, Laser systems engineering

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PROCEEDINGS ARTICLE | March 4, 2016

Characterization of a multi-module tunable EC-QCL system for mid-infrared biofluid spectroscopy for hospital use and personalized diabetes technology

Proc. SPIE. 9715, Optical Diagnostics and Sensing XVI: Toward Point-of-Care Diagnostics

KEYWORDS: Mid-IR, Glucose, Point-of-care devices, Sensors, Calibration, Blood, Spectroscopy, Quantum cascade lasers, Infrared spectroscopy, Spectral resolution, Infrared radiation, Sensing systems, Absorbance, Infrared technology, Pulsed laser operation, Laser systems engineering

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PROCEEDINGS ARTICLE | July 17, 2015

Array sensor: plasmonic improved optical resonance methods and instrument for biomedical diagnostics

Proc. SPIE. 9540, Novel Biophotonics Techniques and Applications III

KEYWORDS: Gold, Plasmonics, Proteins, Biomedical optics, Sensors, Nanoparticles, Particles, Diagnostics, Optical microcavities, Biological weapons

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PROCEEDINGS ARTICLE | July 15, 2015

Mid-infrared spectroscopic characterisation of an ultra-broadband tunable EC-QCL system intended for biomedical applications

Proc. SPIE. 9537, Clinical and Biomedical Spectroscopy and Imaging IV

KEYWORDS: Mid-IR, FT-IR spectroscopy, Glucose, Calibration, Blood, Spectroscopy, Quantum cascade lasers, Spectral resolution, Pulsed laser operation, Plasma

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PROCEEDINGS ARTICLE | November 13, 2014

Ex-situ preparation of high-conductive polymer/SWNTs nanocomposites for structure fabrication

Proc. SPIE. 9277, Nanophotonics and Micro/Nano Optics II

KEYWORDS: Femtosecond phenomena, Two photon polymerization, Polymers, Composites, Laser processing, Raman spectroscopy, Polymerization, Nanocomposites, Single walled carbon nanotubes, Nanolithography

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PROCEEDINGS ARTICLE | October 8, 2014

Selective laser patterning in organic solar cells

Proc. SPIE. 9180, Laser Processing and Fabrication for Solar, Displays, and Optoelectronic Devices III

KEYWORDS: Thin films, Optical lithography, Organic photovoltaics, Electrodes, Glasses, Solar cells, Laser ablation, Printing, Pulsed laser operation, Positron emission tomography

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PROCEEDINGS ARTICLE | September 16, 2014

Holographic optical tweezers: microassembling of shape-complementary 2PP building blocks

Proc. SPIE. 9164, Optical Trapping and Optical Micromanipulation XI

KEYWORDS: Holography, Two photon polymerization, Manufacturing, Laser development, Spatial light modulators, Optical tweezers, Objectives, Spherical lenses, Optics manufacturing, Assembly equipment

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PROCEEDINGS ARTICLE | September 16, 2014

Optical tweezers as manufacturing and characterization tool in microfluidics

Proc. SPIE. 9164, Optical Trapping and Optical Micromanipulation XI

KEYWORDS: Holography, Microfluidics, Silica, Calibration, Particles, Magnetism, Spatial light modulators, Optical tweezers, Optics manufacturing, Liquids

Read Abstract +

SPIE Conference Volume | May 28, 2014

Nanophotonics V

PROCEEDINGS ARTICLE | May 2, 2014

Biochemical component identification by plasmonic improved whispering gallery mode optical resonance based sensor

Proc. SPIE. 9126, Nanophotonics V

KEYWORDS: Gold, Plasmons, Glucose, Biomedical optics, Sensors, Nanoparticles, Neural networks, Biological research, Adhesives, Biological weapons

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PROCEEDINGS ARTICLE | March 24, 2014

Impact of solvent mixture on iron nanoparticles generated by laser ablation

Proc. SPIE. 8955, Colloidal Nanoparticles for Biomedical Applications IX

KEYWORDS: Oxides, Femtosecond phenomena, Iron, Ferromagnetics, Nanoparticles, Particles, Crystals, Magnetism, Transmission electron microscopy, Laser ablation

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PROCEEDINGS ARTICLE | March 7, 2014

Micro-patterning of self-assembled organic monolayers by using tunable ultrafast laser pulses

Proc. SPIE. 8972, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIV

KEYWORDS: Gold, Ultrafast phenomena, Optical lithography, Etching, Glasses, Ocean optics, Ultrafast lasers, Laser damage threshold, Self-assembled monolayers, Pulsed laser operation

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PROCEEDINGS ARTICLE | March 4, 2014

Biochemical component identification by light scattering techniques in whispering gallery mode optical resonance based sensor

Proc. SPIE. 8952, Biomedical Applications of Light Scattering VIII

KEYWORDS: Biomedical optics, Sensors, Light scattering, Data processing, CMOS cameras, Image filtering, Neural networks, Biological research, Chemical elements, Adhesives

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PROCEEDINGS ARTICLE | March 4, 2014

Spherical optical microresonator array as a multi-purpose measuring device

Proc. SPIE. 8960, Laser Resonators, Microresonators, and Beam Control XVI

KEYWORDS: Tunable lasers, Microresonators, Sensors, Calibration, Particles, Measurement devices, Spherical lenses, Optical arrays, Temperature metrology, Laser systems engineering

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PROCEEDINGS ARTICLE | March 3, 2014

Plasmonic improvement of microcavity biomedical sensor spectroscopic characteristics

Proc. SPIE. 8957, Plasmonics in Biology and Medicine XI

KEYWORDS: Gold, Plasmons, Glucose, Biomedical optics, Sensors, Nanoparticles, Glasses, Adhesives, Optical microcavities, Biological weapons

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PROCEEDINGS ARTICLE | February 25, 2014

Influence of multiple particles in optical tweezers on the trapping efficiency

Proc. SPIE. 8999, Complex Light and Optical Forces VIII

KEYWORDS: Refractive index, Polarization, Particles, Photons, Fourier transforms, 3D modeling, Optical tweezers, Ray tracing, Geometrical optics, Spherical lenses

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PROCEEDINGS ARTICLE | February 20, 2014

Dynamical behavior of laser-induced nanoparticles during remote processing

Proc. SPIE. 8963, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications III

KEYWORDS: Light emitting diodes, Signal attenuation, Nanoparticles, Particles, Laser processing, Laser welding, Fiber lasers, Transmission electron microscopy, Laser beam diagnostics, Atmospheric particles

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PROCEEDINGS ARTICLE | September 12, 2013

A modular assembling platform for manufacturing of microsystems by optical tweezers

Proc. SPIE. 8810, Optical Trapping and Optical Micromanipulation X

KEYWORDS: Holography, Microfluidics, Microsystems, Two photon polymerization, Particles, Manufacturing, Optical tweezers, Optics manufacturing, Optical manipulation, Nanolithography

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PROCEEDINGS ARTICLE | June 18, 2013

Drag detection and identification by whispering gallery mode optical resonance based sensor

Proc. SPIE. 8801, Novel Biophotonic Techniques and Applications II

KEYWORDS: Biomedical optics, Optical spheres, Sensors, Diagnostics, Biosensors, Neural networks, Adhesives, Network architectures, Biological weapons, Neurons

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PROCEEDINGS ARTICLE | March 29, 2013

Optical tweezers in microassembly

Proc. SPIE. 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII

KEYWORDS: Microfluidics, Two photon polymerization, Particles, Molecules, Manufacturing, Optical tweezers, Beam shaping, Spherical lenses, Optics manufacturing, Optical manipulation

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PROCEEDINGS ARTICLE | March 5, 2013

Optical micro-assembling of non-spherical particles

Proc. SPIE. 8637, Complex Light and Optical Forces VII

KEYWORDS: Prisms, Holography, Two photon polymerization, Particles, Manufacturing, Fiber lasers, Optical tweezers, Objectives, Spherical lenses, Optics manufacturing

Read Abstract +

SPIE Conference Volume | May 21, 2012

Nanophotonics IV

PROCEEDINGS ARTICLE | May 9, 2012

Whispering gallery mode pressure sensing

Proc. SPIE. 8439, Optical Sensing and Detection II

KEYWORDS: Refractive index, Optical spheres, Resonators, Image processing, Particles, Silicon, Bioalcohols, Spectral resolution, Geometrical optics, Spherical lenses

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PROCEEDINGS ARTICLE | May 1, 2012

Classification of antibiotics by neural network analysis of optical resonance data of whispering gallery modes in dielectric microspheres

Proc. SPIE. 8424, Nanophotonics IV

KEYWORDS: Microfluidics, Microresonators, Optical spheres, Resonators, Sensors, Water, Diagnostics, Neural networks, Sensing systems, Biological research

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PROCEEDINGS ARTICLE | February 18, 2012

Process limitations in microassembling using holographic optical tweezers

Proc. SPIE. 8244, Laser-based Micro- and Nanopackaging and Assembly VI

KEYWORDS: MATLAB, Holograms, Holography, Microfluidics, Particles, Computer generated holography, Spatial light modulators, Optical tweezers, Objectives, Optics manufacturing

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PROCEEDINGS ARTICLE | February 16, 2012

Laser direct writing of high-refractive-index polymer/TiO2 nanocomposites

Proc. SPIE. 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII

KEYWORDS: Refractive index, Transparency, Two photon polymerization, Titanium dioxide, Nanoparticles, Polymers, Composites, Laser applications, Nanocomposites, Photorefractive polymers

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PROCEEDINGS ARTICLE | June 15, 2011

Classification of the micro and nanoparticles and biological agents by neural network analysis of the parameters of optical resonance of whispering gallery mode in dielectric microspheres

Proc. SPIE. 8090, Novel Biophotonic Techniques and Applications

KEYWORDS: Refractive index, Proteins, Biomedical optics, Optical spheres, Sensors, Nanoparticles, Bioalcohols, Neural networks, Biological research, Biological weapons

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PROCEEDINGS ARTICLE | February 21, 2011

Microfabrication by optical tweezers

Proc. SPIE. 7921, Laser-based Micro- and Nanopackaging and Assembly V

KEYWORDS: Microscopes, Holography, Polymers, Particles, Molecules, Manufacturing, Spatial light modulators, Optical tweezers, Objectives, Microfabrication

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PROCEEDINGS ARTICLE | February 21, 2011

Laser selective patterning of ITO on flexible PET for organic photovoltaics

Proc. SPIE. 7921, Laser-based Micro- and Nanopackaging and Assembly V

KEYWORDS: Optical lithography, Organic photovoltaics, Etching, Glasses, Laser applications, Laser ablation, Laser damage threshold, Picosecond phenomena, Positron emission tomography, Absorption

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PROCEEDINGS ARTICLE | May 14, 2010

High resolution spectroscopy with a microparticle array sensor

Proc. SPIE. 7726, Optical Sensing and Detection

KEYWORDS: Prisms, Light sources, Microresonators, Cameras, Sensors, Calibration, Databases, Particles, Near field optics, Correlation function

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PROCEEDINGS ARTICLE | May 11, 2010

Optical micro resonance based sensor schemes for detection and identification of nano particles and biological agents in situ

Proc. SPIE. 7712, Nanophotonics III

KEYWORDS: Refractive index, Proteins, Biomedical optics, Optical spheres, Resonators, Sensors, Water, Particles, Molecules, Biological weapons

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SPIE Conference Volume | May 10, 2010

Nanophotonics III

SPIE Conference Volume | May 28, 2008

Nanophotonics II

PROCEEDINGS ARTICLE | February 26, 2008

Laser beam shaping for micromaterial processing using a liquid crystal display

Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII

KEYWORDS: Signal to noise ratio, Diffraction, Stars, Spatial light modulators, Liquid crystal on silicon, LCDs, Quantization, Diodes, Micromachining, Beam shaping

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PROCEEDINGS ARTICLE | February 23, 2008

Lasers in energy device manufacturing

Proc. SPIE. 6880, Laser-based Micro- and Nanopackaging and Assembly II

KEYWORDS: Laser induced damage, Solar cells, Silicon, Laser processing, Laser drilling, Semiconductor lasers, Excimer lasers, Transparent conductors, Semiconducting wafers, Diode pumped solid state lasers

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PROCEEDINGS ARTICLE | March 13, 2007

Microwelding of electronic components with 532nm laser radiation

Proc. SPIE. 6458, Photon Processing in Microelectronics and Photonics VI

KEYWORDS: Metals, Copper, Laser processing, Nd:YAG lasers, Laser welding, Electronic components, Pulsed laser operation, Lead, Tin, Absorption

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PROCEEDINGS ARTICLE | September 29, 2006

Nonlinear laser-induced damage and absorptance effects in dielectric coatings by using ultra-short pulses

Proc. SPIE. 6400, Femtosecond Phenomena and Nonlinear Optics III

KEYWORDS: Silica, Sputter deposition, Laser induced damage, Photons, Dielectrics, Optical coatings, Ion beams, Laser damage threshold, Pulsed laser operation, Absorption

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PROCEEDINGS ARTICLE | April 20, 2006

Toward femtosecond laser lithography

Proc. SPIE. 6195, Nanophotonics

KEYWORDS: Lithography, Femtosecond phenomena, Optical lithography, Super resolution, Laser ablation, Photoresist materials, Photomasks, Maskless lithography, Pulsed laser operation, Photoresist developing

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SPIE Conference Volume | April 20, 2006

Nanophotonics

PROCEEDINGS ARTICLE | March 1, 2006

Femtosecond laser lithography and applications

Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V

KEYWORDS: Lithography, Femtosecond phenomena, Two photon polymerization, Tissues, Polymers, Photonic crystals, Scanning electron microscopy, Photoresist materials, Photosensitive materials, Laser systems engineering

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PROCEEDINGS ARTICLE | February 23, 2006

Laser micro welding of polymeric components for dental prostheses

Proc. SPIE. 6107, Laser-based Micropackaging

KEYWORDS: Carbon, Visualization, Polymers, Laser energy, Laser processing, Manufacturing, Laser applications, Laser welding, Semiconductor lasers, Tolerancing

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PROCEEDINGS ARTICLE | July 1, 2005

Mass balancing and spring element manipulation of micromechanical silicon-gyrometers with ultrashort laser pulses

Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II

KEYWORDS: Ultrafast phenomena, Sensors, Calibration, Scanners, Video, Silicon, Laser processing, Semiconductor lasers, Laser ablation, Electronic circuits

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PROCEEDINGS ARTICLE | June 8, 2005

Technology improvements for microscale laser sintering

Proc. SPIE. 5827, Opto-Ireland 2005: Photonic Engineering

KEYWORDS: Particles, X-ray diffraction, Laser processing, Manufacturing, Control systems, Oxygen, Process control, Spatial resolution, Microfabrication, Laser sintering

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SPIE Journal Paper | May 1, 2005

Direct-write subwavelength structuring with femtosecond laser pulses

Jürgen Koch, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris Chichkov

OE Vol. 44 Issue 05

KEYWORDS: Femtosecond phenomena, Laser ablation, Nanostructuring, Nanolithography, Metals, Pulsed laser operation, Nanostructures, Diffraction, Laser applications, Laser damage threshold

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PROCEEDINGS ARTICLE | April 12, 2005

Femtosecond versus picosecond laser ablation

Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV

KEYWORDS: Femtosecond phenomena, Silicon, Laser drilling, Semiconductor lasers, Scanning electron microscopy, Laser cutting, Picosecond phenomena, Semiconducting wafers, Pulsed laser operation, Laser systems engineering

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PROCEEDINGS ARTICLE | April 12, 2005

Coincident multiwavelength irradiation of polymers with UV and VUV laser

Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV

KEYWORDS: Polymethylmethacrylate, Foam, Polymers, Ultraviolet radiation, Laser processing, Quantum cascade lasers, Laser ablation, Vacuum ultraviolet, Pulsed laser operation, Absorption

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In this paper the material ablation of polymers with a cascade of two laser pulses of different UV-wavelengths, exploiting the effects of the excited state absorption (ESA), is described. With a first vacuum ultraviolet (VUV) laser pulse with a wavelength of λ = 157 nm, the material is excited at low energy densities. A second, ultraviolet (UV) laser pulse, either λ = 193 nm or λ = 248 nm, is applied with a defined time delay between Δτ = 0 and 200 ns to the first pulse to induce the ablation process. Experiments have been carried out on polymethyl methacrylate (PMMA) and polytetrafluorethylene (PTFE). The effects on the ablation quality, ablation threshold and the ablation rate have been investigated. The focus has been set on the range of low energy densities, aiming for minimum ablation by each single laser pulse. By applying the multi wavelength pulse trains, the ablation quality can be improved, compared to the conventional UV laser machining of such materials. The machining of PMMA with a cascade of λ = 157 and λ = 248 nm does not show the material foaming, which can be observed when applying only λ = 248 nm laser pulses in the low energy regime. Applied on PTFE, the multi wavelength ablation shows improved results when using λ = 157 nm and λ = 193 nm, compared to the pure λ = 193 nm processing. The excited state increases the absorption of the UV laser light in the material, allowing a minimised ablation rate or higher depth resolution. This can be reduced down to the range of some nm (PMMA) or a few ten nm (PTFE). Besides the fluence, the time delay Δτ has been identified as a process parameter to vary the ablation rate. Also this dependency is qualitatively not unique for all wavelength, material and fluence combinations, but most of the experimental data point out an increased sensitivity for time delays between Δτ = 30 and Δτ = 60 ns. This sensitivity correlates with the time resolved temperature course on the surface, which is induced by the excitation pulse.

SPIE Conference Volume | March 21, 2005

Commercial and Biomedical Applications of Ultrafast Lasers V

PROCEEDINGS ARTICLE | December 16, 2004

Contribution to the age determination of fingerprint constituents using laser fluorescence spectroscopy and confocal laser scanning microscopy

Proc. SPIE. 5621, Optical Materials in Defence Systems Technology

KEYWORDS: Microscopes, Magnesium, Spectroscopy, Ultraviolet radiation, Microscopy, Luminescence, Fluorescence spectroscopy, Laser scanners, Laser spectroscopy, Confocal laser scanning microscopy

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PROCEEDINGS ARTICLE | October 8, 2004

Toward nanostructuring with femtosecond laser pulses

Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication

KEYWORDS: Nanostructures, Diffraction, Femtosecond phenomena, Nanostructuring, Metals, Photons, Laser ablation, Laser damage threshold, Nanolithography, Laser systems engineering

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SPIE Conference Volume | October 8, 2004

Fifth International Symposium on Laser Precision Microfabrication

PROCEEDINGS ARTICLE | October 8, 2004

The influence of physical characteristics on ablation effects in UV laser assisted micro engineering

Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication

KEYWORDS: Thermography, Iron, Metals, Copper, Tungsten, Nickel, Laser ablation, Tantalum, Molybdenum, Pulsed laser operation

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PROCEEDINGS ARTICLE | October 8, 2004

Short and ultrashort laser pulses: application-driven comparison of source types

Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication

KEYWORDS: Semiconductors, Polymers, Electrons, Laser processing, Manufacturing, Laser applications, Laser ablation, Laser cutting, Pulsed laser operation, Absorption

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PROCEEDINGS ARTICLE | October 8, 2004

Laser-based induction of the two-way memory effect into shape memory alloy components

Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication

KEYWORDS: Titanium, Nickel, Laser processing, Laser development, Heat treatments, Excimer lasers, Pulsed laser operation, Shape memory alloys, Temperature metrology, Laser systems engineering

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PROCEEDINGS ARTICLE | October 8, 2004

Laser spot welding of electronic micro parts

Proc. SPIE. 5662, Fifth International Symposium on Laser Precision Microfabrication

KEYWORDS: Packaging, Optical filters, Sensors, Metals, Copper, Nd:YAG lasers, Laser welding, Signal processing, Signal detection, Lead

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PROCEEDINGS ARTICLE | September 20, 2004

Nanostructuring of solids with femtosecond laser pulses (Keynote Address)

Proc. SPIE. 5448, High-Power Laser Ablation V

KEYWORDS: Nanostructures, Femtosecond phenomena, Nanostructuring, Metals, Photons, Laser applications, Photonic crystals, Laser ablation, Solids, Nanolithography

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PROCEEDINGS ARTICLE | July 15, 2004

Basic investigations for controlling the laser spot welding process when packaging 3-dimensional molded interconnect devices

Proc. SPIE. 5339, Photon Processing in Microelectronics and Photonics III

KEYWORDS: Packaging, Optical filters, Sensors, Spectroscopy, Laser processing, Laser welding, Scanning electron microscopy, Signal processing, Signal detection, Lead

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PROCEEDINGS ARTICLE | June 1, 2004

Ablation of metals and semiconductors with ultrashort pulsed lasers: improving surface qualities of microcuts and grooves

Proc. SPIE. 5340, Commercial and Biomedical Applications of Ultrafast Lasers IV

KEYWORDS: Femtosecond phenomena, Metals, Electrons, Silicon, Semiconductor lasers, Laser ablation, Laser cutting, Semiconducting wafers, Pulsed laser operation, Laser systems engineering

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SPIE Conference Volume | June 1, 2004

Commercial and Biomedical Applications of Ultrafast Lasers IV

PROCEEDINGS ARTICLE | April 2, 2004

Precision shaping of transparent materials for optical devices with VUV laser radiation

Proc. SPIE. 5399, Laser-Assisted Micro- and Nanotechnologies 2003

KEYWORDS: Optical components, Diffractive optical elements, Silica, Lenses, Nitrogen, Laser ablation, Excimer lasers, Vacuum ultraviolet, Pulsed laser operation, Diffraction gratings

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PROCEEDINGS ARTICLE | February 26, 2004

Automatic control of a thermal-based polishing process for aspherical optics

Proc. SPIE. 5252, Optical Fabrication, Testing, and Metrology

KEYWORDS: Polishing, Glasses, Laser processing, Control systems, Pyrometry, Process control, Microwave radiation, Automatic control, Surface finishing, Temperature metrology

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PROCEEDINGS ARTICLE | November 18, 2003

Sapphire tools for laser-assisted microforming

Proc. SPIE. 5063, Fourth International Symposium on Laser Precision Microfabrication

KEYWORDS: Metals, Ultraviolet radiation, Laser processing, Manufacturing, Sapphire, Transmittance, Aluminum, Excimer lasers, Sapphire lasers, Helium

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PROCEEDINGS ARTICLE | November 18, 2003

Compact electron-based EUV source

Proc. SPIE. 5063, Fourth International Symposium on Laser Precision Microfabrication

KEYWORDS: Metrology, Calibration, X-rays, Tungsten, Electrons, Silicon, Solids, Extreme ultraviolet, Beryllium, X-ray technology

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PROCEEDINGS ARTICLE | November 18, 2003

Machining of optical microstructures with 157 nm laser radiation

Proc. SPIE. 5063, Fourth International Symposium on Laser Precision Microfabrication

KEYWORDS: Optical components, Diffractive optical elements, Silica, Lenses, Nitrogen, Laser ablation, Excimer lasers, Pulsed laser operation, Atmospheric optics, Diffraction gratings

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SPIE Conference Volume | November 18, 2003

Fourth International Symposium on Laser Precision Microfabrication

PROCEEDINGS ARTICLE | October 17, 2003

Precision drilling of fused silica with 157-nm excimer laser radiation

Proc. SPIE. 4977, Photon Processing in Microelectronics and Photonics II

KEYWORDS: Silica, Quartz, Glasses, Laser drilling, Laser ablation, Gas lasers, Excimer lasers, Carbon monoxide, Plasma, Absorption

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PROCEEDINGS ARTICLE | October 17, 2003

3D-MID and process monitoring for microjoining applications

Proc. SPIE. 4977, Photon Processing in Microelectronics and Photonics II

KEYWORDS: Packaging, Optical sensors, Sensors, Metals, Laser processing, Laser applications, Laser welding, Signal processing, Signal detection, Pulsed laser operation

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PROCEEDINGS ARTICLE | October 17, 2003

Laser-based manufacturing of high-accuracy electrodes into brittle materials

Proc. SPIE. 4977, Photon Processing in Microelectronics and Photonics II

KEYWORDS: Sensors, Electrodes, Glasses, Ceramics, Dielectrics, Manufacturing, Laser ablation, Excimer lasers, Laser manufacturing, Electroplating

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SPIE Conference Volume | June 19, 2003

Commercial and Biomedical Applications of Ultrafast Lasers III

PROCEEDINGS ARTICLE | June 16, 2003

Compact electron-based extreme-ultraviolet source at 13.5 nm

Proc. SPIE. 5037, Emerging Lithographic Technologies VII

KEYWORDS: Spectrographs, Metrology, Titanium, Photons, Electrons, Silicon, Solids, Extreme ultraviolet, Molybdenum, Beryllium

Read Abstract +

PROCEEDINGS ARTICLE | April 29, 2003

Toward nanostructuring with femtosecond laser pulses

Proc. SPIE. 5118, Nanotechnology

KEYWORDS: Nanostructures, Diffraction, Femtosecond phenomena, Nanostructuring, Metals, Laser applications, Laser ablation, Laser damage threshold, Pulsed laser operation, Nanolithography

Read Abstract +

SPIE Conference Volume | April 15, 2003

Laser Micromachining for Optoelectronic Device Fabrication

SPIE Journal Paper | April 1, 2003

Compact electron-based extreme ultraviolet source at 13.5 nm

Andre Egbert, Bjoern Mader, Boris Tkachenko, Andreas Ostendorf, Carsten Fallnich, Boris Chichkov, Thomas Miflalla, Max Schuermann, Kai Gaebel, Guido Schriever, Uwe Stamm

JM3 Vol. 2 Issue 02

KEYWORDS: Extreme ultraviolet, Electrons, Silicon, Solids, Beryllium, Photons, Metrology, X-rays, X-ray technology, Extreme ultraviolet lithography

Read Abstract +

PROCEEDINGS ARTICLE | March 3, 2003

Putting fundamentals on multiphase material balance of laser-based cutting polymers and natural fiber composites to practical use

Proc. SPIE. 4831, First International Symposium on High-Power Laser Macroprocessing

KEYWORDS: Polymethylmethacrylate, Polymers, Composites, Gases, Laser processing, Materials processing, Laser drilling, Carbon dioxide lasers, Laser cutting, Airborne laser technology

Read Abstract +

PROCEEDINGS ARTICLE | February 19, 2003

Microprocessing using UV solid state laser systems with high repetition rate

Proc. SPIE. 4830, Third International Symposium on Laser Precision Microfabrication

KEYWORDS: Gold, Quartz, Silicon, Laser processing, Manufacturing, Solid state lasers, Semiconductor lasers, Laser ablation, Laser cutting, Diode pumped solid state lasers

Read Abstract +

PROCEEDINGS ARTICLE | February 19, 2003

Medical and biological applications for ultrafast laser pulses

Proc. SPIE. 4830, Third International Symposium on Laser Precision Microfabrication

KEYWORDS: Femtosecond phenomena, Laser vision correction, Cornea, Tissues, Surgery, Laser ablation, Laser cutting, Laser dentistry, Pulsed laser operation, Laser tissue interaction

Read Abstract +

PROCEEDINGS ARTICLE | February 19, 2003

Speed-rate improvement for microcutting of thin silicon with femtosecond laser pulses

Proc. SPIE. 4830, Third International Symposium on Laser Precision Microfabrication

KEYWORDS: Femtosecond phenomena, Polarization, Electrons, Silicon, Semiconductor lasers, Laser ablation, Laser cutting, Semiconducting wafers, Laser systems engineering, Absorption

Read Abstract +

PROCEEDINGS ARTICLE | September 13, 2002

Femtosecond laser ablation and nanostructuring

Proc. SPIE. 4760, High-Power Laser Ablation IV

KEYWORDS: Microscopes, Femtosecond phenomena, Nanostructuring, Glasses, Laser energy, Laser ablation, Solids, Objectives, Pulsed laser operation, Nanolithography

Read Abstract +

PROCEEDINGS ARTICLE | September 13, 2002

Deep drilling of metals by femtosecond laser pulses

Proc. SPIE. 4760, High-Power Laser Ablation IV

KEYWORDS: Femtosecond phenomena, Metals, Laser processing, Materials processing, Laser applications, Laser drilling, Laser ablation, Laser damage threshold, Laser optics, Pulsed laser operation

Read Abstract +

PROCEEDINGS ARTICLE | September 13, 2002

Processing of semiconductors with femtosecond lasers

Proc. SPIE. 4760, High-Power Laser Ablation IV

KEYWORDS: Semiconductors, Femtosecond phenomena, Polarization, Silicon, Semiconductor lasers, Laser ablation, Microelectronics, Laser cutting, Semiconducting wafers, Absorption

Read Abstract +

PROCEEDINGS ARTICLE | June 18, 2002

Production of innovative geometries with UV lasers

Proc. SPIE. 4637, Photon Processing in Microelectronics and Photonics

KEYWORDS: Polishing, 3D acquisition, Sensors, Glasses, Ultraviolet radiation, Ceramics, Distortion, Laser ablation, Excimer lasers, Surface finishing

Read Abstract +

PROCEEDINGS ARTICLE | April 1, 2002

Development of an industrial femtosecond laser micromachining system

Proc. SPIE. 4633, Commercial and Biomedical Applications of Ultrafast and Free-Electron Lasers

KEYWORDS: Femtosecond phenomena, Surgery, Polymers, Manufacturing, Laser development, Semiconductor lasers, Micromachining, Laser cutting, Pulsed laser operation, Laser systems engineering

Read Abstract +

SPIE Conference Volume | April 1, 2002

Commercial and Biomedical Applications of Ultrafast and Free-Electron Lasers

SPIE Conference Volume | April 1, 2002

Commercial and Biomedical Applications of Ultrafast and Free-Electron Lasers

PROCEEDINGS ARTICLE | February 25, 2002

Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers

Proc. SPIE. 4426, Second International Symposium on Laser Precision Microfabrication

KEYWORDS: Ceramics, Laser processing, Manufacturing, Nd:YAG lasers, Laser drilling, Photomasks, Excimer lasers, Laser cutting, Excimers, Pulsed laser operation

Read Abstract +

PROCEEDINGS ARTICLE | February 25, 2002

Precision machining of innovative materials using 157-nm excimer laser radiation

Proc. SPIE. 4426, Second International Symposium on Laser Precision Microfabrication

KEYWORDS: Refractive index, Silica, Waveguides, Quartz, Glasses, Laser applications, Laser ablation, Excimer lasers, Microfabrication, Fluorine

Read Abstract +

PROCEEDINGS ARTICLE | February 25, 2002

Generation of periodic microstructures with femtosecond laser pulses

Proc. SPIE. 4426, Second International Symposium on Laser Precision Microfabrication

KEYWORDS: Femtosecond phenomena, Silica, Polymers, Metals, Dielectrics, Laser ablation, Solids, Streak cameras, Polymerization, Micromachining

Read Abstract +

PROCEEDINGS ARTICLE | June 29, 2001

Structuring silicon with femtosecond lasers

Proc. SPIE. 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

KEYWORDS: Ultrafast phenomena, Femtosecond phenomena, Polarization, Reflection, Crystals, Silicon, Doping, Semiconductor lasers, Laser cutting, Semiconducting wafers

Read Abstract +

PROCEEDINGS ARTICLE | June 29, 2001

Short-pulse and short-wavelength ablation of semiconductor materials

Proc. SPIE. 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

KEYWORDS: Semiconductors, Femtosecond phenomena, Photons, Electrons, Silicon, Semiconductor lasers, Laser ablation, Excimer lasers, Vacuum ultraviolet, Absorption

Read Abstract +

PROCEEDINGS ARTICLE | May 29, 2001

Controlled CO2 laser cutting on the border to beginning of plasma

Proc. SPIE. 4276, Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics

KEYWORDS: Mirrors, Sensors, Laser drilling, Signal processing, Gas lasers, Laser cutting, Plasma generation, Carbon monoxide, Pulsed laser operation, Plasma

Read Abstract +

PROCEEDINGS ARTICLE | November 6, 2000

Micromachining using femtosecond lasers

Proc. SPIE. 4088, First International Symposium on Laser Precision Microfabrication

KEYWORDS: Diamond, Femtosecond phenomena, Diamond machining, Polymers, Glasses, Electrons, Laser processing, Laser drilling, Laser ablation, Micromachining

Read Abstract +

PROCEEDINGS ARTICLE | September 1, 2000

3D microstructuring with F2 lasers

Proc. SPIE. 4075, Micro-Opto-Electro-Mechanical Systems

KEYWORDS: Modeling, Quartz, Glasses, Laser processing, Materials processing, Manufacturing, 3D modeling, Laser ablation, Excimer lasers, Process modeling

Read Abstract +

PROCEEDINGS ARTICLE | August 25, 2000

Flexible processing of large scale LCD panels using scanner-deflected UV-laser radiation

Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI

KEYWORDS: Oxides, Scanners, Indium, Manufacturing, LCDs, Tin

Read Abstract +

PROCEEDINGS ARTICLE | August 25, 2000

Flexible machining system to produce micro-prototypes

Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI

KEYWORDS: Laser sources, Laser processing, Computer aided design, Product engineering, Rapid manufacturing, Stereolithography, Prototyping, Laser sintering, Laser systems engineering

Read Abstract +

PROCEEDINGS ARTICLE | November 24, 1999

Online quality control of laser welding using supporting line-shaped IR detection

Proc. SPIE. 3832, Sensors and Controls for Intelligent Machining and Manufacturing Mechatronics

KEYWORDS: Mirrors, Optical sensors, Cameras, Sensors, Metals, Image processing, Laser welding, Data processing, Signal processing, Signal detection

Read Abstract +

PROCEEDINGS ARTICLE | March 10, 1999

Precision machining using UV and ultrashort-pulse lasers

Proc. SPIE. 3680, Design, Test, and Microfabrication of MEMS and MOEMS

KEYWORDS: Ultrafast phenomena, Glasses, Ceramics, Nd:YAG lasers, Laser drilling, Semiconductor lasers, Laser ablation, Excimer lasers, Laser cutting, Pulsed laser operation

Read Abstract +

PROCEEDINGS ARTICLE | September 24, 1997

UV-laser machining offers new horizon in diffractive optical elements small-series manufacturing

Proc. SPIE. 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications

KEYWORDS: Optical components, Diamond turning, Single point diamond turning, Diffractive optical elements, Diamond machining, Glasses, Laser processing, Manufacturing, Optics manufacturing, Prototyping

Read Abstract +

PROCEEDINGS ARTICLE | March 31, 1997

General machining concept for producing micro-optics with high-power UV lasers

Proc. SPIE. 2992, Excimer Lasers, Optics, and Applications

KEYWORDS: Optical components, Glasses, High power lasers, Manufacturing, Laser ablation, Micro optics, Excimer lasers, Flint glass, Optics manufacturing, Absorption

Read Abstract +

Showing 5 of 113 publications

Conference Committee Involvement (39)

Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence

9 September 2019 | Strasbourg, France

Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence

10 September 2018 | Berlin, Germany

Optical Micro- and Nanometrology

25 April 2018 | Strasbourg, France

Nanophotonics

22 April 2018 | Strasbourg, France

Optical Micro- and Nanometrology

5 April 2016 | Brussels, Belgium

Showing 5 of 39 published special sections

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