Dr. Andreas Rathsfeld
at WIAS
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 18 December 2012 Paper
Proc. SPIE. 8550, Optical Systems Design 2012
KEYWORDS: Diffraction, Line width roughness, Line edge roughness, Extreme ultraviolet, Finite element methods, Scatterometry, Critical dimension metrology, Edge roughness, Optical testing, Cadmium

Proceedings Article | 17 June 2009 Paper
Proc. SPIE. 7390, Modeling Aspects in Optical Metrology II
KEYWORDS: Extreme ultraviolet, Deep ultraviolet, Scatterometry, Photomasks, Inverse problems, Diffraction, Scanning electron microscopy, Diffraction gratings, Monte Carlo methods, Inverse optics

Proceedings Article | 17 June 2009 Paper
Proc. SPIE. 7390, Modeling Aspects in Optical Metrology II
KEYWORDS: Extreme ultraviolet, Photomasks, Scatterometry, Inverse problems, Reconstruction algorithms, Diffraction, Monte Carlo methods, Reflectometry, Data modeling, Finite element methods

Proceedings Article | 25 April 2008 Paper
Proc. SPIE. 6995, Optical Micro- and Nanometrology in Microsystems Technology II
KEYWORDS: Extreme ultraviolet, Scatterometry, Phase shifts, Inverse problems, Diffraction gratings, Monte Carlo methods, Diffraction, Reconstruction algorithms, Finite element methods, Photomasks

Proceedings Article | 22 March 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Diffraction, Sensors, Deep ultraviolet, Photomasks, Metrology, Scatterometry, Polarization, Reflectometry, Prisms, Finite element methods

Showing 5 of 7 publications
Conference Committee Involvement (6)
Modeling Aspects in Optical Metrology
26 June 2017 | Munich, Germany
Modeling Aspects in Optical Metrology V
23 June 2015 | Munich, Germany
Modeling Aspects in Optical Metrology IV
13 May 2013 | Munich, Germany
Modeling Aspects in Optical Metrology
23 May 2011 | Munich, Germany
Modeling Aspects in Optical Metrology
15 June 2009 | Munich, Germany
Showing 5 of 6 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top