Mr. Andreas Stephen Profile

Andreas Stephen

at BIAS GmbH

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Author

Publications (6)

Proceedings Article | 21 February 2011 Paper

Laser-chemical finishing of micro forming tools

Andreas Stephen, Christoph Gerhard, Frank Vollertsen

Proceedings Volume 7921, 79210J (2011) https://doi.org/10.1117/12.873705

KEYWORDS: Optical spheres, Chemical lasers, Reflection, Continuous wave operation, Superposition, Chemical reactions, Veins, Metals, Laser processing, Laser ablation

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Proceedings Article | 10 December 2005 Paper

Laser-induced generation of shaped holes by variable beam shaping

Andreas Stephen, Simeon Metev, Werner Jüptner, Frank Vollertsen

Proceedings Volume 6157, 61570I (2005) https://doi.org/10.1117/12.661207

KEYWORDS: Beam shaping, Telescopes, Diffraction, Device simulation, Geometrical optics, Laser beam propagation, Nd:YAG lasers, Process control, Optical simulations, Gaussian beams

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Proceedings Article | 2 April 2004 Paper

Laser-induced chemistry: an advanced tool for micro structuring, synthesis, and modification of materials

Simeon Metev, Andreas Stephen, Joerg Schwarz, Carsten Wochnowski

Proceedings Volume 5399, (2004) https://doi.org/10.1117/12.555542

KEYWORDS: Etching, Plasma, Polymers, Metals, Atmospheric plasma, Laser applications, Liquids, Chemical vapor deposition, Refractive index, Waveguides

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Proceedings Article | 18 November 2003 Paper

Principles and applications of laser-induced liquid-phase jet-chemical etching

Andreas Stephen, Simeon Metev, Frank Vollertsen

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.540525

KEYWORDS: Etching, Metals, Laser applications, Liquids, Laser processing, Wet etching, Laser irradiation, Thin films, Electrodes, Sensor technology

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Proceedings Article | 19 February 2003 Paper

Selective thermo/photochemical treatment of materials: a new trend in laser microtechnology

Simeon Metev, Andreas Stephen, Jorg Schwarz, Carsten Wochnowski

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486583

KEYWORDS: Etching, Plasma, Metals, Atmospheric plasma, Polymers, Laser applications, Liquids, Refractive index, Chemical vapor deposition, Waveguides

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Proceedings Article | 25 February 2002 Paper

Precise laser-assisted 3D microstructuring of metals and alloys

Gerd Sepold, Andreas Stephen, Thorsten Lilienkamp, Simeon Metev

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456819

KEYWORDS: Etching, Metals, Polymers, Laser processing, Excimer lasers, Wet etching, Laser applications, Chemical lasers, Microfluidics, Liquids

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In the following, three different laser-assisted processes are described and herewith produced components in the fields of micromechanics are presented. First, excimer laser projection technology is modified in order to produce large- area microstructures. It enables the transfers of structures having dimensions much larger than the laser beam section by synchronized scanning of the mask and the substrate. This technology is used to manufacture master structures in polymers for injection molding inserts. The insert tool itself is produced by electroforming of the master leading to metallic copy of the master. In this way, a metallic insert tool is performed for the production of microfluidic components. Its structured area is 2 cm² at a resolution better than 3 micrometers . Second, laser-induce wet chemical etching using a sw-Nd:YAG laser is described. The principle of this micromachining method is based on a local thermal activation of chemical etching reactions on the surface of the material. The direct processing of the workpiece resulted in high accuracy microstructuring with smooth surfaces and without any debris or thermal influence on the material properties. Among others, one example in the field of application in micromechanics is the fabrication of superelastic micro-grippers prepared by cutting of temperature sensitive shape memory alloys. The achieved sidewall angle is about 3 degrees and the surface roughness less than 0.4 micrometers for machined 200 micrometers thick foils. Third, a combination of the two afore mentioned processes leads to complex shaped microstructures in metallic parts. Thereby, additional microstructures of specific shape, e.g. V-shaped grooves, are machined by laser-induced wet chemical etching into metallic inserts produced by electroforming of excimer laser-induced wet chemical etching into metallic inserts produce by electroforming of excimer laser machined masters. They are used for hot embossing tools enabling the production of special housings which can be hermetically sealed by ultrasonic welding.

Showing 5 of 6 publications

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