Dr. Andreas Wagener
at Univ Siegen
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | December 20, 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Microelectromechanical systems, Materials processing, Manufacturing, 3D modeling, Microelectronics, Photomasks, TCAD, Prototyping, Process modeling, Device simulation

PROCEEDINGS ARTICLE | April 21, 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Fabrication, Microelectromechanical systems, Silicon, Materials processing, Manufacturing, Photomasks, Process modeling, Device simulation, Process engineering, Environmental management

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Microelectromechanical systems, Data storage, Databases, Interfaces, Data processing, Structural design, Semiconducting wafers, Prototyping, Process modeling, Environmental management

PROCEEDINGS ARTICLE | January 5, 2006
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Microelectromechanical systems, Computer simulations, 3D modeling, Data processing, Photomasks, Structural design, TCAD, Process modeling, Device simulation, Environmental management

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Data modeling, Databases, Etching, Polymers, Interfaces, Materials processing, Data processing, Computer aided design, Process engineering

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Microelectromechanical systems, Microsystems, Databases, Etching, Interfaces, Data processing, Java, Computer aided design, Computer architecture, Nanoelectronics

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top