Dr. Andrei Sabac
at Univ de Franche-Comté
SPIE Involvement:
Author
Publications (13)

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Micromirrors, Waveguides, Silicon, Integrated optics, Semiconducting wafers, Mirrors, Photomasks, Sensors, Packaging, Etching

PROCEEDINGS ARTICLE | June 13, 2005
Proc. SPIE. 5856, Optical Measurement Systems for Industrial Inspection IV
KEYWORDS: Microelectromechanical systems, Actuators, Refractive index, Ferroelectric materials, Waveguides, Sensors, Silicon, Transducers, Optical resolution, Protactinium

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5719, MOEMS and Miniaturized Systems V
KEYWORDS: Microelectromechanical systems, Refractive index, Mirrors, Mach-Zehnder interferometers, Waveguides, Sensors, Silicon, Transducers, Micromirrors, Integrated optics

PROCEEDINGS ARTICLE | August 17, 2004
Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Waveguides, Calibration, Silicon, Integrated optics, Geometrical optics, Light wave propagation, Radio propagation, Phase shifts

PROCEEDINGS ARTICLE | August 2, 2004
Proc. SPIE. 5532, Interferometry XII: Applications
KEYWORDS: Oxides, Thin films, Refractive index, Silicon, Interferometry, Silicon films, Finite element methods, Plasma enhanced chemical vapor deposition, Thin film deposition, Semiconducting wafers

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Mirrors, Mach-Zehnder interferometers, Waveguides, Silicon, Micromirrors, Integrated optics, Plasma enhanced chemical vapor deposition, Semiconducting wafers

Showing 5 of 13 publications
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