Dr. Andrei Sabac
at Univ de Franche-Comté
SPIE Involvement:
Publications (13)

SPIE Journal Paper | 1 April 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Micromirrors, Waveguides, Silicon, Integrated optics, Semiconducting wafers, Mirrors, Photomasks, Sensors, Packaging, Etching

Proceedings Article | 13 June 2005 Paper
Proc. SPIE. 5856, Optical Measurement Systems for Industrial Inspection IV
KEYWORDS: Microelectromechanical systems, Actuators, Refractive index, Ferroelectric materials, Waveguides, Sensors, Silicon, Transducers, Optical resolution, Protactinium

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5719, MOEMS and Miniaturized Systems V
KEYWORDS: Microelectromechanical systems, Refractive index, Mirrors, Mach-Zehnder interferometers, Waveguides, Sensors, Silicon, Transducers, Micromirrors, Integrated optics

Proceedings Article | 17 August 2004 Paper
Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Waveguides, Calibration, Silicon, Integrated optics, Geometrical optics, Light wave propagation, Radio propagation, Phase shifts

Proceedings Article | 2 August 2004 Paper
Proc. SPIE. 5532, Interferometry XII: Applications
KEYWORDS: Oxides, Thin films, Refractive index, Silicon, Interferometry, Silicon films, Finite element methods, Plasma enhanced chemical vapor deposition, Thin film deposition, Semiconducting wafers

Showing 5 of 13 publications
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