Dr. Andrei V. Shchegrov
Sr Director of Advanced Development at KLA Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (18)

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Plasma, Lamps, Xenon, Single crystal X-ray diffraction, Light sources, Metrology, Signal to noise ratio, Spectroscopy, Electrodes, Scatterometry

Proceedings Article | 22 February 2011
Proc. SPIE. 7917, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications X
KEYWORDS: Laser sources, Modulation, Projection systems, Laser development, Semiconductor lasers, RGB color model, Photodiodes, Lithium niobate, Nonlinear crystals, Neodymium lasers

Proceedings Article | 18 February 2010
Proc. SPIE. 7582, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications IX
KEYWORDS: Projection systems, Laser sources, Semiconductor lasers, Crystals, Nonlinear crystals, Harmonic generation, Laser crystals, Lithium niobate, Waveguides, Laser development

Proceedings Article | 23 February 2006
Proc. SPIE. 6135, Liquid Crystal Materials, Devices, and Applications XI
KEYWORDS: Laser applications, Semiconductor lasers, Lamps, RGB color model, Semiconducting wafers, Televisions, Projection systems, Laser video displays, Liquid crystal on silicon, Speckle

Proceedings Article | 14 March 2005
Proc. SPIE. 5737, Vertical-Cavity Surface-Emitting Lasers IX
KEYWORDS: Laser applications, Second-harmonic generation, Nonlinear crystals, Laser development, Laser marking, Light sources, Televisions, Pulsed laser operation, Continuous wave operation

Showing 5 of 18 publications
Conference Committee Involvement (7)
Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XV
15 February 2016 | San Francisco, California, United States
Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XIV
9 February 2015 | San Francisco, California, United States
Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XIII
4 February 2014 | San Francisco, California, United States
Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XII
5 February 2013 | San Francisco, California, United States
Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XI
24 January 2012 | San Francisco, California, United States
Showing 5 of 7 Conference Committees
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