Andrei Ushkov
at
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Publications (1)

PROCEEDINGS ARTICLE | September 19, 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Lithography, Plasmonics, Plasmons, Polarization, Metals, Numerical simulations, Photoresist materials, Photoresist developing, Nanolithography, Diffraction gratings

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