Mr. Andrew D. Berwick Profile

Andrew D. Berwick

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Publications (3)

Proceedings Article | 27 May 2009 Paper

Error-budget paradigms and laser mask pattern generator evolution

H. Christopher Hamaker, Matthew Jolley, Andrew Berwick

Proceedings Volume 7470, 74700W (2009) https://doi.org/10.1117/12.835194

KEYWORDS: Supercontinuum generation, Printing, Critical dimension metrology, Convolution, Photomasks, Calibration, Etching, Integrated circuits, Integrated circuit design, Lithography

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Proceedings Article | 5 November 2005 Paper

Performance of the ALTA 4700 with variable print strategy and optimized resist process

Paul Allen, H. Christopher Hamaker, Cris Morgante, Andrew Berwick, Michael White

Proceedings Volume 5992, 59920W (2005) https://doi.org/10.1117/12.633049

KEYWORDS: Critical dimension metrology, Printing, Photoresist processing, Error analysis, Composites, Calibration, Standards development, Plasma etching, Logic, Metals

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Proceedings Article | 20 August 2004 Paper

DUV ALTA system aerial image enhancement for improved pattern fidelity: phase II

Michael Ungureit, Samuel Howells, T. Chabreck, J. Hubbard, Asher Klatchko, Peter Pirogovsky, Robin Teitzel, Andrew Berwick, B. Skyborg, Paul Allen, Cris Morgante, Michael White

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557806

KEYWORDS: Artificial intelligence, Image enhancement, Evolutionary algorithms, Vestigial sideband modulation, Photomasks, Optical proximity correction, Deep ultraviolet, Scanning electron microscopy, Metals, Field programmable gate arrays

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