Dr. Andrew E. Carlson
Sr. Design Engineer at Advanced Micro Devices Inc
SPIE Involvement:
Publications (7)

SPIE Journal Paper | 1 January 2009
JM3 Vol. 8 Issue 01
KEYWORDS: Lithography, Photomasks, Etching, Optical lithography, Critical dimension metrology, Anisotropic etching, Silicon, Amorphous silicon, Chemical vapor deposition, Transistors

Proceedings Article | 12 August 2008
Proc. SPIE. 7099, Photonics North 2008
KEYWORDS: Solar cells, Antireflective coatings, Coating, Refractive index, Silicon, Solar concentrators, Absorption, Photovoltaics, Multijunction solar cells, Ultraviolet radiation

Proceedings Article | 11 April 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Photomasks, Etching, Critical dimension metrology, Optical lithography, Chemical vapor deposition, Silicon, Amorphous silicon, Transistors, Anisotropic etching

Proceedings Article | 5 July 2000
Proc. SPIE. 4006, Interferometry in Optical Astronomy
KEYWORDS: Interferometers, Ferroelectric materials, CCD cameras, Sensors, Charge-coupled devices, Metrology, Fringe analysis, Beam splitters, Cameras, Visibility

Proceedings Article | 24 July 1998
Proc. SPIE. 3350, Astronomical Interferometry
KEYWORDS: Mirrors, Metrology, Interferometers, Waveguides, Retroreflectors, Stars, Prisms, Beam splitters, Charge-coupled devices, Coating

Showing 5 of 7 publications
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