Andrew R. Dick
at
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | July 26, 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Dielectrics, Optical lithography, Polymers, Semiconducting wafers, Ultraviolet radiation, Silicon, Solids, Thin films, Sodium, Near ultraviolet

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Packaging, Near ultraviolet, Optical lithography, Polymers, Ultraviolet radiation, Dielectrics, Silicon, Silicon films, Absorbance, Semiconducting wafers

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