Mr. Andrew John Dowling Profile

Andrew John Dowling

at Swinburne Univ of Technology

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Author

Publications (4)

PROCEEDINGS ARTICLE | April 2, 2004

Selective wet-etching of filtered arc deposited TiN films on Cr sacrificial layers

Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III

KEYWORDS: Microelectromechanical systems, Optical lithography, Sensors, Etching, Silicon, Chromium, Scanning electron microscopy, Bridges, Photomasks, Tin

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PROCEEDINGS ARTICLE | November 13, 2002

Single-shot selective laser micromachining of filtered-arc-deposited TiN films from chromium underlayer

Proc. SPIE. 4934, Smart Materials II

KEYWORDS: Confocal microscopy, Optical filters, Optical lithography, Silicon, Chromium, Scanning electron microscopy, Laser ablation, Excimer lasers, Micromachining, Tin

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PROCEEDINGS ARTICLE | November 21, 2001

Laser-LIGA for Serpentine Ni Microstructure

Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II

KEYWORDS: Confocal microscopy, Optical lithography, Etching, Polymers, Copper, Nickel, Silicon, Laser ablation, Photoresist materials, Excimer lasers

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PROCEEDINGS ARTICLE | November 21, 2001

Excimer laser patterning of TiN film from metal sacrificial layers

Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II

KEYWORDS: Confocal microscopy, Optical lithography, Metals, Copper, Silicon, Chromium, Laser ablation, Excimer lasers, Photomicroscopy, Tin

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