Mr. Andrew John Dowling Profile

Mr. Andrew John Dowling

at Swinburne Univ of Technology

SPIE Involvement:

Author

Publications (4)

PROCEEDINGS ARTICLE | April 2, 2004

Selective wet-etching of filtered arc deposited TiN films on Cr sacrificial layers

Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III

KEYWORDS: Microelectromechanical systems, Optical lithography, Sensors, Etching, Silicon, Chromium, Scanning electron microscopy, Bridges, Photomasks, Tin

Read Abstract

PROCEEDINGS ARTICLE | November 13, 2002

Single-shot selective laser micromachining of filtered-arc-deposited TiN films from chromium underlayer

Proc. SPIE. 4934, Smart Materials II

KEYWORDS: Confocal microscopy, Optical filters, Optical lithography, Silicon, Chromium, Scanning electron microscopy, Laser ablation, Excimer lasers, Micromachining, Tin

Read Abstract

PROCEEDINGS ARTICLE | November 21, 2001

Laser-LIGA for Serpentine Ni Microstructure

Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II

KEYWORDS: Confocal microscopy, Optical lithography, Etching, Polymers, Copper, Nickel, Silicon, Laser ablation, Photoresist materials, Excimer lasers

Read Abstract

PROCEEDINGS ARTICLE | November 21, 2001

Excimer laser patterning of TiN film from metal sacrificial layers

Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II

KEYWORDS: Confocal microscopy, Optical lithography, Metals, Copper, Silicon, Chromium, Laser ablation, Excimer lasers, Photomicroscopy, Tin

Read Abstract

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years