Andrew John Dowling
at Swinburne Univ of Technology
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Optical lithography, Sensors, Etching, Silicon, Chromium, Scanning electron microscopy, Bridges, Photomasks, Tin

Proceedings Article | 13 November 2002
Proc. SPIE. 4934, Smart Materials II
KEYWORDS: Confocal microscopy, Optical filters, Optical lithography, Silicon, Chromium, Scanning electron microscopy, Laser ablation, Excimer lasers, Micromachining, Tin

Proceedings Article | 21 November 2001
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Confocal microscopy, Optical lithography, Etching, Polymers, Copper, Nickel, Silicon, Laser ablation, Photoresist materials, Excimer lasers

Proceedings Article | 21 November 2001
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Confocal microscopy, Optical lithography, Metals, Copper, Silicon, Chromium, Laser ablation, Excimer lasers, Photomicroscopy, Tin

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