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Andrew W. Fanning
Optical Engineer at Fanning Technical Services
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Publications (4)
Proceedings Article | 20 May 2004 Paper
Measuring thermal expansion variations in ULE glass with interferometry
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535133
KEYWORDS: Glasses, Ultrasonics, Refractive index, Prisms, Interferometry, Metrology, Extreme ultraviolet lithography, Photomasks, Spatial resolution, Refraction
Proceedings Article | 16 June 2003 Paper
Measuring and tailoring CTE within ULE glass
Andrew Fanning, Bradford Ackerman, Kenneth Hrdina, David Jenne, Christine Heckle, W. Navan
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484925
KEYWORDS: Glasses, Ultrasonics, Metrology, Interferometers, Photomasks, Interferometry, Extreme ultraviolet lithography, Spatial resolution, Refraction, Optical components
Proceedings Article | 14 September 2001 Paper
Achieving low-wavefront specifications for DUV lithography: impact of residual stress in HPFS fused silica
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435680
KEYWORDS: Birefringence, Silica, Wavefronts, Wavefront distortions, Refraction, Refractive index, Interferometers, Interferometry, Lithography, Deep ultraviolet
Proceedings Article | 11 November 1999 Paper
Polished homogeneity testing of Corning fused silica boules
Proceedings Volume 3782, (1999) https://doi.org/10.1117/12.369224
KEYWORDS: Polishing, Silica, Wavefronts, Surface finishing, Interferometers, Reflection, Time metrology, Refraction, National Ignition Facility, Interferometry
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