Dr. Andrew Greene
at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | 21 February 2023 Open Access
JM3, Vol. 22, Issue 03, 031203, (February 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031203
KEYWORDS: Metrology, Interferometry, Data modeling, Tunable filters, Semiconducting wafers, Scatterometry, Optical filters, Machine learning, Education and training, Dielectrics

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 120530S (2022) https://doi.org/10.1117/12.2614077
KEYWORDS: Metrology, Semiconducting wafers, Scatterometry, Optical filters, Dielectrics, Data modeling, Back end of line, Front end of line, Chemical mechanical planarization, Transmission electron microscopy

SPIE Journal Paper | 18 April 2022 Open Access
JM3, Vol. 21, Issue 02, 021206, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021206
KEYWORDS: Metrology, Scatterometry, Optical lithography, Machine learning, Silicon, Atomic force microscopy, Nanowires, Germanium, Line edge roughness, Scanning electron microscopy

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11611, 116111U (2021) https://doi.org/10.1117/12.2582364
KEYWORDS: Interferometry, Silicon, Metrology, Scatterometry, Reflectometry, Transmission electron microscopy, Semiconductor manufacturing, Reflectivity, Polarization control

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11611, 116111R (2021) https://doi.org/10.1117/12.2583636
KEYWORDS: Metrology, Line edge roughness, Gallium arsenide, Transistors, Semiconductors, Nondestructive evaluation, Nanotechnology, Manufacturing, Machine learning, Logic

Showing 5 of 8 publications
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