Mr. Andrew Habermas Profile

Andrew Habermas

Technical Development Engineer at Seagate Technology LLC

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Publications (3)

Proceedings Article | 24 May 2004 Paper

Contact hole edge roughness: circles vs. stars

Andrew Habermas, Qingyou Lu, David Chase-Colin, Michael Har-Zvi, Aviram Tam, Omer Sagi

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.537537

KEYWORDS: Etching, Semiconducting wafers, Edge roughness, Photoresist processing, Electrical breakdown, Metals, Stars, Line edge roughness, Cadmium sulfide, Process control

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Proceedings Article | 16 July 2002 Paper

Overlay accuracy: a metal layer study

Andrew Habermas, Bradley Ferguson, Joel Seligson, Elyakim Kassel, Pavel Izikson

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473466

KEYWORDS: Etching, Metals, Semiconducting wafers, Overlay metrology, Atomic force microscopy, Diffractive optical elements, Manufacturing, Metrology, Chemical mechanical planarization, Tolerancing

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Proceedings Article | 16 July 2002 Paper

193-nm CD shrinkage under SEM: modeling the mechanism

Andrew Habermas, Dongsung Hong, Matthew Ross, William Livesay

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473436

KEYWORDS: Photoresist materials, Scanning electron microscopy, Monte Carlo methods, Electron beams, FT-IR spectroscopy, Systems modeling, Optical lithography, 193nm lithography, Amplifiers, Scanning probe microscopy

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