Mr. Andrew C. Hartley
at Univ of Leeds
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Fabrication, Actuators, Multilayers, Ferromagnetics, Copper, Silver, Magnetism, Photoresist materials, Electroplating, Electromagnetism

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