Andrew V. Hill
Optical System Designer at KLA Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 August 1993
Proc. SPIE. 1927, Optical/Laser Microlithography
KEYWORDS: Lithography, Monochromatic aberrations, Optical design, Optical lithography, Silica, Manufacturing, Wavefronts, Distortion, Objectives, Tolerancing

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