Andrew Liang
at Lam Research Corp
SPIE Involvement:
Publications (3)

Proceedings Article | 22 March 2018 Paper
Gregory Blachut, Stephen Sirard, Andrew Liang, Chris Mack, Michael Maher, Paulina Rincon-Delgadillo, Boon Teik Chan, Geert Mannaert, Geert Vandenberghe, C. Grant Willson, Christopher Ellison, Diane Hymes
Proceedings Volume 10589, 1058907 (2018)
KEYWORDS: Etching, Silicon, Chemistry, Reactive ion etching, Directed self assembly, Semiconducting wafers, Dry etching, Scanning electron microscopy, Line edge roughness

Proceedings Article | 13 March 2018 Paper
Andrew Liang, Chris Mack, Stephen Sirard, Chen-wei Liang, Liu Yang, Justin Jiang, Nader Shamma, Rich Wise, Jengyi Yu, Diane Hymes
Proceedings Volume 10585, 1058524 (2018)
KEYWORDS: Etching, Line width roughness, Line edge roughness, Silicon, Scanning electron microscopy, Standards development, Metrology, Photoresist processing, Image filtering

Proceedings Article | 24 March 2017 Presentation + Paper
Andrew Liang, Jan Hermans, Timothy Tran, Katja Viatkina, Chen-Wei Liang, Brandon Ward, Steven Chuang, Jengyi Yu, Greg Harm, Jelle Vandereyken, David Rio, Michael Kubis, Samantha Tan, Mircea Dusa, Akhil Singhal, Bart van Schravendijk, Girish Dixit, Nader Shamma, Rich Wise, Sirish Reddy
Proceedings Volume 10143, 1014319 (2017)
KEYWORDS: Extreme ultraviolet lithography, Etching, Extreme ultraviolet, Lithography, High volume manufacturing, Stochastic processes, Plasma etching, Reactive ion etching, Plasma enhanced chemical vapor deposition, Focus stacking software, Photomasks

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