Dr. Andrew J. Merriam
President at Lumeras LLC
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 28 February 2009 Paper
Proc. SPIE. 7193, Solid State Lasers XVIII: Technology and Devices
KEYWORDS: Diffraction, Mirrors, Ferroelectric materials, Optical parametric oscillators, Optical amplifiers, Fiber Bragg gratings, Output couplers, Ultraviolet radiation, Crystals, Diffraction gratings

Proceedings Article | 26 March 2007 Paper
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Laser sources, Lithography, Prisms, Interferometers, Solid state lasers, Interferometry, Photoresist materials, Immersion lithography, Semiconducting wafers, Visibility

Proceedings Article | 9 November 2005 Paper
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Microscopes, Metrology, Optical parametric oscillators, Ultraviolet radiation, Crystals, Nd:YAG lasers, Solid state lasers, CCD cameras, Photomasks, Nonlinear crystals

Proceedings Article | 10 May 2005 Paper
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Microscopes, Fringe analysis, Metrology, Imaging systems, Interferometers, Interferometry, Objectives, Photomasks, Excimer lasers, Phase shifts

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Light sources, Metrology, Optical parametric oscillators, Ultraviolet radiation, Crystals, Solid state lasers, Photomasks, Laser crystals, Nonlinear crystals, Solid state physics

Showing 5 of 9 publications
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