Dr. Andrew J. Peters
Postdoctoral Researcher at Univ of Minnesota
SPIE Involvement:
Author
Area of Expertise:
Block Polymers , Directed Self-Assmembly , Molecular Dynamics , Simulation , Micelles
Publications (18)

SPIE Journal Paper | October 27, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Line edge roughness, Line width roughness, Optical lithography, Double patterning technology, Interfaces, Directed self assembly, Polymers, Polymerization, Etching, Chemical species

SPIE Journal Paper | May 10, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Directed self assembly, Thermodynamics, Polymers, Interfaces, Computer simulations, Polymerization, Systems modeling, Binary data, Thin films, Semiconductors

SPIE Journal Paper | March 8, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Directed self assembly, Thin films, Interfaces, Polymers, Annealing, Diffusion, Scattering, Computer simulations, Process control

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Thin films, Polymers, Annealing, Interfaces, Diffusion, Computer simulations, Process control, Bridges, Directed self assembly, Neodymium

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Thin films, Lithography, Visualization, Polymers, Interfaces, Physics, Computer simulations, Directed self assembly, Systems modeling, Molecular self-assembly

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Thin films, Optical lithography, Data modeling, Chemical species, Polymers, Directed self assembly, Chemical analysis, Double patterning technology, Line edge roughness, Molecular self-assembly

Showing 5 of 18 publications
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