Dr. Andrew J. Peters
Postdoctoral Researcher at Univ of Minnesota
SPIE Involvement:
Author
Area of Expertise:
Block Polymers , Directed Self-Assmembly , Molecular Dynamics , Simulation , Micelles
Publications (18)

SPIE Journal Paper | 27 October 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Line edge roughness, Line width roughness, Optical lithography, Double patterning technology, Interfaces, Directed self assembly, Polymers, Polymerization, Etching, Chemical species

SPIE Journal Paper | 10 May 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Directed self assembly, Thermodynamics, Polymers, Interfaces, Computer simulations, Polymerization, Systems modeling, Binary data, Thin films, Semiconductors

SPIE Journal Paper | 8 March 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Directed self assembly, Thin films, Interfaces, Polymers, Annealing, Diffusion, Scattering, Computer simulations, Process control

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Thin films, Polymers, Interfaces, Diffusion, Neodymium, Bridges, Annealing, Computer simulations, Process control, Directed self assembly

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Interfaces, Polymers, Thin films, Systems modeling, Molecular self-assembly, Computer simulations, Lithography, Physics, Visualization, Directed self assembly

Showing 5 of 18 publications
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