Andrew C. Rudack
Sr Metrology Specialist at SUNY Poly SEMATECH
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9179, Reliability of Photovoltaic Cells, Modules, Components, and Systems VII
KEYWORDS: Photovoltaics, Metrology, Solar cells, Crystals, Silicon, Manufacturing, Reliability, Silicon solar cells, Diodes, Semiconducting wafers

SPIE Journal Paper | June 5, 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Annealing, X-rays, Finite element methods, Semiconducting wafers, Tomography, Copper, Inspection, X-ray imaging, X-ray microscopy, Silicon

PROCEEDINGS ARTICLE | April 5, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Copper, Ions, Inspection, Scanning electron microscopy, Xenon, Ion beams, Plating, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | April 4, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Microscopes, Metrology, Etching, Copper, Inspection, 3D metrology, Semiconducting wafers, Infrared microscopy, Wafer bonding, Overlay metrology

PROCEEDINGS ARTICLE | April 3, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Annealing, X-rays, Copper, Silicon, X-ray microscopy, Inspection, Tomography, X-ray imaging, Semiconducting wafers, 3D image processing

PROCEEDINGS ARTICLE | April 20, 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Optical microscopes, Metrology, 3D acquisition, Polarization, Silicon, 3D modeling, Scanning electron microscopy, 3D metrology, Photomasks, Overlay metrology

Showing 5 of 12 publications
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