Andrew Stamper
at IBM Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Metrology, Manufacturing, Inspection, Scanning electron microscopy, Ion beams, 3D metrology, Dimensional metrology, Critical dimension metrology, Semiconducting wafers, Defect inspection

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