Dr. Andrew Joseph Watts
Senior Engineer Manager
SPIE Involvement:
Publications (12)

Proceedings Article | 23 March 2009 Paper
John Bruley, Geoffrey Burr, Robert Davis, Philip Flaitz, William Hinsberg, Frances Houle, Dolores Miller, Michael Pike, Jed Rankin, Alfred Wagner, Andrew Watts
Proceedings Volume 7272, 727215 (2009) https://doi.org/10.1117/12.813934
KEYWORDS: Photomasks, Chromium, Semiconducting wafers, Binary data, Manufacturing, Diffusion, Transmission electron microscopy, Roads, Photoresist materials, Oxidation

Proceedings Article | 14 May 2007 Paper
K. Racette, A. Watts, M. Barrett, R. Nolan, Y. Sasaki, Y. Kikuchi, T. Matsumura
Proceedings Volume 6607, 66071V (2007) https://doi.org/10.1117/12.728978
KEYWORDS: Pellicles, Photomasks, Adhesives, Distortion, Platinum, Manufacturing, Optical lithography, Optics manufacturing, Electronics, Printing

Proceedings Article | 20 October 2006 Paper
Louis Kindt, Andrew Watts, Jay Burnham, William Aaskov
Proceedings Volume 6349, 63491J (2006) https://doi.org/10.1117/12.686228
KEYWORDS: Ozone, Scanning probe microscopy, Photomasks, Photoresist processing, Cryogenics, Manufacturing, Particles, Fermium, Frequency modulation, Inspection

Proceedings Article | 20 May 2006 Paper
Andrew Watts, Chet Huang, Yiyang Wang, Cuc Huynh, Craig Benson, Adam Smith
Proceedings Volume 6283, 628303 (2006) https://doi.org/10.1117/12.681730
KEYWORDS: Photomasks, Manufacturing, Control systems, Semiconducting wafers, Process control, Statistical analysis, Etching, Inspection, Error analysis, Yield improvement

Proceedings Article | 20 May 2006 Paper
Richard Wistrom, Dennis Hayden, Kenneth Racette, Monica Barrett, Andrew Watts
Proceedings Volume 6283, 628326 (2006) https://doi.org/10.1117/12.681775
KEYWORDS: Pellicles, Photomasks, Adhesives, Distortion, Manufacturing, Optics manufacturing, Optical lithography, Lithography, Optical mounts, Reticles

Showing 5 of 12 publications
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