Dr. Andrew Joseph Watts
Senior Engineer Manager
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 23 March 2009 Paper
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Roads, Diffusion, Manufacturing, Chromium, Transmission electron microscopy, Photoresist materials, Photomasks, Semiconducting wafers, Binary data, Oxidation

Proceedings Article | 14 May 2007 Paper
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Electronics, Optical lithography, Manufacturing, Distortion, Platinum, Pellicles, Printing, Photomasks, Adhesives, Optics manufacturing

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Particles, Manufacturing, Inspection, Frequency modulation, Photomasks, Fermium, Scanning probe microscopy, Ozone, Photoresist processing, Cryogenics

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Statistical analysis, Etching, Error analysis, Manufacturing, Inspection, Control systems, Process control, Photomasks, Semiconducting wafers, Yield improvement

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Lithography, Reticles, Optical lithography, Manufacturing, Distortion, Pellicles, Photomasks, Adhesives, Optical mounts, Optics manufacturing

Showing 5 of 12 publications
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