Prof. Andrew K. Whittaker
Professor at Univ of Queensland
Publications (19)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 124980U (2023)
KEYWORDS: Polymers, Polymethylmethacrylate, Spectroscopy, Molecular interactions, Molecules, FT-IR spectroscopy, Atomic layer deposition, Vacuum, Silicon, Semiconducting wafers

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11612, 116120Q (2021)
KEYWORDS: Nanostructures, Photomasks, Nanolithography, Control systems, Ultraviolet radiation, Thin films, Nanodomains, Interfaces, Fabrication, Electron beams

Proceedings Article | 27 March 2017 Presentation + Paper
Ke Du, Meiliana Siauw, David Valade, Marek Jasieniak, Nico Voelcker, Peter Trefonas, Jim Thackeray, Idriss Blakey, Andrew Whittaker
Proceedings Volume 10146, 101460D (2017)
KEYWORDS: Polymers, Polymerization, Extreme ultraviolet lithography, Electron beam lithography, Photoresist materials, Polymer thin films, Extreme ultraviolet, Semiconducting wafers, Refractive index, Absorbance

Proceedings Article | 21 March 2016 Paper
Proceedings Volume 9779, 97790J (2016)
KEYWORDS: Nanoparticles, Metals, Oxides, Extreme ultraviolet lithography, Photoresist materials, Optical lithography, Electron beam lithography, Scanning electron microscopy, Materials processing, Photoresist developing, Particles, Zirconium, Hafnium, Transmission electron microscopy

Proceedings Article | 26 March 2013 Paper
Ya-Mi Chuang, Han-Hao Cheng, Kevin Jack, Andrew Whittaker, Idriss Blakey
Proceedings Volume 8680, 868009 (2013)
KEYWORDS: Polymers, Annealing, Line edge roughness, Lithography, Semiconducting wafers, Atomic force microscopy, Electron beam lithography, Directed self assembly, Extreme ultraviolet lithography, Photoresist materials

Showing 5 of 19 publications
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