Prof. Andrew K. Whittaker
Professor at Univ of Queensland
Publications (17)

Proceedings Article | 27 March 2017 Presentation + Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Electron beam lithography, Refractive index, Polymers, Photoresist materials, Polymerization, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Semiconducting wafers, Polymer thin films

Proceedings Article | 21 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Oxides, Electron beam lithography, Optical lithography, Nanoparticles, Metals, Particles, Materials processing, Scanning electron microscopy, Transmission electron microscopy, Photoresist materials, Extreme ultraviolet lithography, Hafnium, Zirconium, Photoresist developing

Proceedings Article | 26 March 2013 Paper
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Electron beam lithography, Polymers, Annealing, Atomic force microscopy, Photoresist materials, Directed self assembly, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers

Proceedings Article | 21 March 2012 Paper
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Etching, Polymers, Glasses, Photoresist materials, Directed self assembly, Extreme ultraviolet lithography, Picosecond phenomena, Line edge roughness, Reactive ion etching

Proceedings Article | 24 December 2011 Paper
Proc. SPIE. 8204, Smart Nano-Micro Materials and Devices
KEYWORDS: Plasmonics, Nanostructures, Finite-difference time-domain method, Stars, Nanoparticles, Silver, Numerical simulations, Computer simulations, Near field, Nano optics

Showing 5 of 17 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top