Dr. Andrew Yacoot
at National Physical Lab
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X
KEYWORDS: Mirrors, Beam splitters, Digital signal processing, Modulation, Interferometers, Calibration, Interferometry, Data acquisition, Signal processing, Laser interferometry, Homodyne detection, Sensor calibration, Nanolithography

PROCEEDINGS ARTICLE | January 12, 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Signal to noise ratio, Point spread functions, Principal component analysis, Interferometers, Photons, Optical testing, Artificial neural networks, Optical resolution, Critical dimension metrology, Classification systems

PROCEEDINGS ARTICLE | August 29, 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Signal to noise ratio, Optical microscopes, Interferometers, Fourier transforms, Optical testing, Artificial neural networks, Signal processing, Objectives, Optical tracking, Optical networks

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