Dr. Andrew Yacoot
at National Physical Lab
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 June 2017
Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X
KEYWORDS: Mirrors, Nanolithography, Beam splitters, Signal processing, Calibration, Interferometry, Data acquisition, Interferometers, Homodyne detection, Laser interferometry, Sensor calibration, Modulation, Digital signal processing

Proceedings Article | 12 January 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Signal to noise ratio, Interferometers, Principal component analysis, Artificial neural networks, Photons, Point spread functions, Classification systems, Optical testing, Critical dimension metrology, Optical resolution

Proceedings Article | 29 August 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Interferometers, Artificial neural networks, Optical tracking, Objectives, Signal to noise ratio, Fourier transforms, Optical testing, Optical networks, Signal processing, Optical microscopes

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