Andrey V. Kaziev
at National Research Nuclear Univ MEPhI
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 7, 2015
Proc. SPIE. 9442, Optics and Measurement Conference 2014
KEYWORDS: Polishing, Silica, Sputter deposition, Nickel, Ions, Silicon, Surface roughness, Power supplies, Aluminum, Plasma

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