Dr. Andrey A. Lutich
Data Scientist at Sachcontrol GmbH
SPIE Involvement:
Author
Publications (16)

SPIE Journal Paper | 6 March 2018
JM3 Vol. 17 Issue 01
KEYWORDS: Etching, Scanning electron microscopy, Data modeling, Optical proximity correction, Optical lithography, Performance modeling, Calibration, Anisotropic etching, Artificial neural networks, 3D modeling

Proceedings Article | 28 September 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Metrology, Data modeling, Calibration, Etching, Image processing, Scanning electron microscopy, Buildings, Optical proximity correction, Performance modeling, Resolution enhancement technologies

Proceedings Article | 28 September 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Optical lithography, Calibration, Etching, Physics, Scanning electron microscopy, Photoresist materials, Distance measurement, Optical proximity correction, Anisotropic etching

SPIE Journal Paper | 19 September 2017
JM3 Vol. 16 Issue 03
KEYWORDS: Computer aided design, Analytics, Neural networks, Semiconductors, Optical lithography, Machine learning, Network architectures, Neurons, Artificial neural networks, Evolutionary algorithms

Proceedings Article | 30 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Optical lithography, Statistical analysis, Diffractive optical elements, Silicon, Diffusion, Manufacturing, Monte Carlo methods, Shape analysis, Design for manufacturability

Showing 5 of 16 publications
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