Dr. Andrey Nikipelov
at ASML Netherlands BV
SPIE Involvement:
Publications (5)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530E (2024) https://doi.org/10.1117/12.3009896
KEYWORDS: Particles, Plasma, Electrons, Adhesion, Scanners, Hydrogen, Extreme ultraviolet lithography, Ions, Stochastic processes, Particle contamination

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11609, 116090N (2021) https://doi.org/10.1117/12.2583981
KEYWORDS: Particles, Reticles, Extreme ultraviolet, Tin, X-rays, Statistical analysis, Scanning electron microscopy, Scanners, Photomasks, Pellicles

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11609, 116091F (2021) https://doi.org/10.1117/12.2581666
KEYWORDS: Plasma, Particles, Hydrogen, Tin, Lead, Extreme ultraviolet lithography, Ions, Semiconducting wafers, Reticles, Extreme ultraviolet

Proceedings Article | 23 March 2020 Paper
Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Ferdi van de Wetering, Selwyn Cats, Luuk Heijmans, Andrey Nikipelov, Adam Lassise, Vadim Banine
Proceedings Volume 11323, 113230Y (2020) https://doi.org/10.1117/12.2551020
KEYWORDS: Plasma, Particles, Ions, Extreme ultraviolet, Scanners, Hydrogen, Reticles, Particle contamination

Proceedings Article | 26 March 2019 Presentation + Paper
Proceedings Volume 10957, 109570U (2019) https://doi.org/10.1117/12.2514874
KEYWORDS: Particles, Reticles, Scanners, Pellicles, Plasma, Extreme ultraviolet, Particle contamination

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