Dr. Andrey G. Sedukhin
Senior Research Scientist at Institute of Automation and Electrometry SB of RAS
SPIE Involvement:
Publications (9)

Proceedings Article | 19 December 2022 Presentation + Paper
Proceedings Volume 12318, 123180O (2022) https://doi.org/10.1117/12.2643710
KEYWORDS: Chromium, Spatial resolution, Multiphoton lithography, Computer generated holography, Thin films, Reflection, Oxidation, Laser applications, Diffraction

Proceedings Article | 19 December 2022 Poster + Presentation + Paper
Proceedings Volume 12318, 123182G (2022) https://doi.org/10.1117/12.2643720
KEYWORDS: Photoresist materials, Diffraction, Tolerancing, Diffraction gratings, Multiphoton lithography, Photomasks, Statistical analysis, Process control, Glasses, Distortion

Proceedings Article | 9 October 2021 Poster + Paper
Proceedings Volume 11895, 118951D (2021) https://doi.org/10.1117/12.2604810
KEYWORDS: Diffraction, Reflection, Polarization, Etching, Interferometry, Optical spheres, Computer simulations

Proceedings Article | 10 October 2020 Poster + Paper
Proceedings Volume 11551, 115511I (2020) https://doi.org/10.1117/12.2573608
KEYWORDS: Optical spheres, Polarization, Interferometry, Computer generated holography, Transmittance, Diffraction, Wavefronts, Modulation, Error analysis, Mirrors

Proceedings Article | 23 April 2019 Presentation + Paper
Victor Korolkov, Andrey Sedukhin, Dmitry Belousov, Ruslan Shimansky, Vladimir Khomutov, Sergey Mikerin, Evgeny Spesivtsev, Roman Kutz
Proceedings Volume 11030, 110300A (2019) https://doi.org/10.1117/12.2520978
KEYWORDS: Metals, Titanium, Zirconium, Thin films, Oxidation, Multiphoton lithography, Reflection, Spatial resolution, Refractive index, Laser systems engineering

Showing 5 of 9 publications
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