Prof. Andrivo Rusydi
at National Univ of Singapore
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 June 2018 Paper
Luis Rodríguez-de Marcos, Leong Ong Bin, Teguh Citra Asmara, Sascha Pierre Heussler, Albert Guerrero , Roser Mas , Xavier Borrise, Mark B. H. Breese, Andrivo Rusydi
Proceedings Volume 10691, 1069124 (2018) https://doi.org/10.1117/12.2314459
KEYWORDS: Deep ultraviolet, Dielectrics, Polarizers, Finite-difference time-domain method, Electron beam lithography, Thin films, Oxides

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