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Dr. Andriy Knysh
President & CEO at MicroSecurity Lab Inc
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Publications (1)
Proceedings Article | 28 May 2004 Paper
Sub-0.25-pm 50-W amplified excimer laser system for 193-nm lithography
Sergei Govorkov, Alexander Wiessner, Gongxue Hua, Timur Misuryaev, Andrey Knysh, Stefan Spratte, Peter Lokai, Tamas Nagy, Igor Bragin, Andreas Targsdorf, Thomas Schroeder, Hans-Stephan Albrecht, Rainer Desor, Thomas Schmidt, Rainer Paetzel
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536374
KEYWORDS: Oscillators, Optical amplifiers, Excimer lasers, Laser systems engineering, Lithography, Molybdenum, Amplifiers, Optical lithography, Optics manufacturing, Pulsed laser operation
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