Dr. Andrzej T. Kudla
at Institute of Electron Technology
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | October 5, 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Oxides, Thin films, Refractive index, Glasses, Annealing, Composites, Silicon, Atomic force microscopy, Zirconium, Absorption

PROCEEDINGS ARTICLE | August 29, 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Ellipsometry, Refractive index, Optical properties, Metals, Dielectrics, Silicon, Interferometry, Spectroscopic ellipsometry, Aluminum, Phase shifts

PROCEEDINGS ARTICLE | August 10, 2001
Proc. SPIE. 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light
KEYWORDS: Oxides, Refractive index, Optical properties, Etching, Dielectrics, Surface roughness, Gallium antimonide, Spectroscopic ellipsometry, Wet etching, Human-computer interaction

PROCEEDINGS ARTICLE | August 10, 2001
Proc. SPIE. 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light
KEYWORDS: Refractive index, Data modeling, Optical properties, Spectroscopy, Annealing, Interfaces, Silicon, Surface roughness, Scanning electron microscopy, Spectroscopic ellipsometry

PROCEEDINGS ARTICLE | April 17, 2001
Proc. SPIE. 4413, International Conference on Solid State Crystals 2000: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology
KEYWORDS: Oxides, Polishing, Etching, Dielectrics, Gallium antimonide, Atomic force microscopy, Reactive ion etching, Anisotropic etching, Surface finishing, Plasma

PROCEEDINGS ARTICLE | April 1, 1997
Proc. SPIE. 3094, Polarimetry and Ellipsometry

Showing 5 of 6 publications
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