Dr. Li-Ji Lyu
Chief Scientist at MKS Instruments Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 14, 2013
Proc. SPIE. 8885, Laser-Induced Damage in Optical Materials: 2013
KEYWORDS: Antireflective coatings, Polishing, Silica, Laser induced damage, Coating, Resistance, Surface roughness, Ultraviolet coatings, Surface finishing, Absorption

PROCEEDINGS ARTICLE | December 4, 2012
Proc. SPIE. 8530, Laser-Induced Damage in Optical Materials: 2012
KEYWORDS: Antireflective coatings, Polishing, Silica, Laser induced damage, Coating, Resistance, Surface roughness, Ultraviolet coatings, Surface finishing, Absorption

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