The paper will describe an automated subaperture stitching interferometry for large plano surface based on relevant algorithm, which restruct the whole surface without recording the position of every subaperture. Both correction and data fusion algorithm are used to minimize the stitching error.
A new technique for precise wavefront measurement of lens with a hologram is presented. In diffraction, the Fresnel-zone plate hologram emulates the reflective properties of a spherical mirror for use during transmission null tests of an optic by use of a phase-shifting interferometer. Experiment shows that the Fresnel-zone hologram method result is quite similar with that of the traditional interferometry testing method, in which retroreflecting spherical surfaces are used as the reference. The benefit of this methodology is the higher degree of precision at lower cost of manufacturing the reflecting hologram, compared with retrospheres capable of delivering similar precision. This technique is widely applicable and is particularly useful for measuring long focus lens.