Ms. Angela Schneider Profile

Angela Schneider

at Institut für Mikroelektronik Stuttgart

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Matthias Wahl, Jeff Michelmann, Holger Sailer, Angela Schneider, Nicolas Dionisio

Proceedings Volume 12956, 129560A (2024) https://doi.org/10.1117/12.3010803

KEYWORDS: Direct write lithography, Equipment, Lithography, Advanced patterning, Image quality, Semiconducting wafers

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Keywords/Phrases