Dr. Anirudha V. Sumant
at Argonne National Lab
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 7 June 2013
Proc. SPIE. 8709, Detection and Sensing of Mines, Explosive Objects, and Obscured Targets XVIII
KEYWORDS: Silica, Etching, X-rays, Copper, Tungsten, X-ray sources, Transmission electron microscopy, Finite element methods, Photomasks, Prototyping

Proceedings Article | 5 May 2010
Proc. SPIE. 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II
KEYWORDS: Diamond, Spectrometers, Silicon, Nitrogen, Mass spectrometry, Pollution control, Ionization, Semiconducting wafers, Scanning tunneling microscopy, Carbon nanotubes

Proceedings Article | 5 May 2010
Proc. SPIE. 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II
KEYWORDS: Microelectromechanical systems, Thin films, Diamond, Switches, Silica, Electrodes, Dielectrics, Silicon, Hydrogen, Plasmas

Proceedings Article | 12 May 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Carbon, Thin films, Diamond, Tungsten, Silicon, Scanning electron microscopy, Raman spectroscopy, Semiconducting wafers, CMOS devices, Plasma

Proceedings Article | 12 May 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Microelectromechanical systems, Carbon, Diamond, Resonators, Chemical species, Crystals, Silicon, Silicon films, Semiconducting wafers, Temperature metrology

Showing 5 of 8 publications
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