Dr. Anisha Goswami Mukherjee
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 February 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Fabrication, Gold, Copper, Nickel, Silicon, Oxygen, Scanning electron microscopy, Photoresist materials, Tin, Oxidation

Proceedings Article | 26 February 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Microelectromechanical systems, Gold, Etching, Metals, Photoresist materials, Dysprosium, Deep reactive ion etching, Plating, Semiconducting wafers, Electroplating

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