Dr. Anjie Ming Profile

Dr. Anjie Ming

at Institute of Microelectronics

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Author

Publications (4)

Proceedings Article | 7 February 2006 Paper

The packaging technology of optical switch arrays

Wangbin Zhu, Xia Jin, Weibiao Wang, Lijun Wang, Zichun Le, Anjie Ming, Weiyou Chen, Jingqiu Liang, Weihua Lan, Wei Dong, Lina Zhao

Proceedings Volume 6032, 60320O (2006) https://doi.org/10.1117/12.667874

KEYWORDS: Collimators, Mirrors, Optical switching, Microopto electromechanical systems, Packaging, Etching, Switches, Silicon, Optics manufacturing, Anisotropic etching

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Proceedings Article | 30 December 2004 Paper

The study on the compound x-ray refractive lens using LIGA technique

Weihua Lan, Weibiao Wang, Jingqiu Liang, Bisheng Quan, Zichun Le, Jinsong Yao, Liangqiang Peng, Futing Yi, Ming Xuan, Jian Ye, Lijun Wang, Anjie Ming

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.570760

KEYWORDS: X-rays, Polymethylmethacrylate, X-ray lithography, Photomasks, X-ray technology, Photoresist materials, Manufacturing, Electroplating, X-ray optics, Absorption

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Proceedings Article | 30 December 2004 Paper

Study on optical parts of MOEMS optical switch with low insertion loss

Jinsong Yao, Lijun Wang, Weibiao Wang, Anjie Ming, Wei Dong, Zichun Le, Weihua Lan, Weiyou Chen, Jingqiu Liang

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.570729

KEYWORDS: Silicon, Microopto electromechanical systems, Etching, Mirrors, Optical switching, Packaging, Micromirrors, Single mode fibers, Switches, Optical components

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Proceedings Article | 20 August 2004 Paper

The masks fabricated by UV LIGA for excimer laser ablation and x-ray lithography

Bisheng Quan, Ming Xuan, Lijun Wang, Jingqiu Liang, Weibiao Wang, Jinsong Yao, Zichun Le, Weihua Lan, Jian Ye, Anjie Ming, Liangqiang Peng

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557781

KEYWORDS: Photomasks, Excimer lasers, Laser ablation, X-rays, X-ray lithography, Ultraviolet radiation, Photoresist materials, Polymers, Gold, Scanning electron microscopy

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