Mr. Ankush Mahajan Profile

Ankush Mahajan

Student at Indian Institute of Technology (Indian School of Mines) Dhanbad

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Publications (1)

SPIE Journal Paper | 6 October 2017

Reliable before-fabrication forecasting of normal and touch mode MEMS capacitive pressure sensor: modeling and simulation

Sumit Kumar Jindal, Ankush Mahajan, Sanjeev Kumar Raghuwanshi

JM3, Vol. 16, Issue 04, 045001, (October 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.4.045001

KEYWORDS: Sensors, Capacitance, Oxides, Microelectromechanical systems, Modeling and simulation, Silicon, Electrodes, MATLAB, Mathematical modeling, Numerical simulations

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