Dr. Ann Spanos
at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Polymers, Silicon, Scanning electron microscopy, Picosecond phenomena, Photomicroscopy, Semiconducting wafers, Polymer thin films

PROCEEDINGS ARTICLE | March 7, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Refractive index, Microfluidics, Contamination, Hydrogen, Oxygen, Laser irradiation, Absorbance, Immersion lithography, Chemical elements, Absorption

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top