Dr. Anna Andrle
at Lawrence Berkeley National Laboratory
SPIE Involvement:
Publications (7)

Proceedings Article | 27 April 2023 Presentation + Paper
Philipp Hönicke, Yves Kayser, Victor Soltwisch, Andre Wählisch, Nils Wauschkuhn, Jeroen Scheerder, Claudia Fleischmann, Janusz Bogdanowicz, Anne-Laure Charley, Anabela Veloso, Roger Loo, Hans Mertens, Andriy Hikavyy, Thomas Siefke, Anna Andrle, Grzegorz Gwalt, Frank Siewert, Richard Ciesielski, Burkhard Beckhoff
Proceedings Volume 12496, 124961J (2023) https://doi.org/10.1117/12.2657963
KEYWORDS: Nanostructures, X-ray fluorescence spectroscopy, Metrology, Semiconductors, Fluorescence intensity, Data modeling, Transmission electron microscopy, Small targets

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12293, 122930Y (2022) https://doi.org/10.1117/12.2643246
KEYWORDS: Extreme ultraviolet, Scatterometry, Photomasks, Refractive index, Scattering, Reflectivity, Metrology, Databases, Oxidation, Multilayers, Extreme ultraviolet lithography, Extreme ultraviolet coatings, Modeling and simulation, Optical constants, Optical metrology

Proceedings Article | 1 November 2022 Paper
V. Soltwisch, S. Glabisch, A. Andrle, V. Philipsen, Q. Saadeh, S. Schröder, L. Lohr, R. Ciesielski, S. Brose
Proceedings Volume 12472, 124720Q (2022) https://doi.org/10.1117/12.2640176
KEYWORDS: Extreme ultraviolet, Scatterometry, Diffraction, Reflectivity, X-rays, Photomasks, Reflectometry, Scattering, Ruthenium, Optical components

Proceedings Article | 21 June 2021 Presentation + Paper
Zanyar Salami, Analía Fernández Herrero, Anna Andrle, Philipp Hönicke, Victor Soltwisch
Proceedings Volume 11783, 1178307 (2021) https://doi.org/10.1117/12.2592611
KEYWORDS: Line edge roughness, Line width roughness, Nanostructures, X-ray fluorescence spectroscopy, X-rays, Oxides, Scatterometry, Grazing incidence, Finite element methods

Proceedings Article | 22 February 2021 Presentation
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch
Proceedings Volume 11611, 116110R (2021) https://doi.org/10.1117/12.2586082
KEYWORDS: Nanostructures, Metrology, Machine learning, X-rays, X-ray optics, X-ray fluorescence spectroscopy, Statistical analysis, Semiconducting wafers, Reflectivity, Nondestructive evaluation

Showing 5 of 7 publications
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