Ms. Anna Dedkova Profile

Anna Dedkova

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Publications (2)

Proceedings Article | 31 January 2022 Paper

Techniques for analyzing digital elevation models of surface topography of microelectronics objects

A. Dedkova, I. Florinsky, N. Djuzhev

Proceedings Volume 12157, 121571K (2022) https://doi.org/10.1117/12.2623908

KEYWORDS: Surface properties, Surface roughness, 3D surface sensing, Nanotechnology, Semiconducting wafers, Microelectronics, Silicon, Shape analysis, Data modeling, Visualization, Thin films, Mathematical modeling

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Proceedings Article | 31 January 2022 Paper

Investigation of the influence of the parameters of the temporary bonding and thinning operations on the bending of silicon wafers

N. Djuzhev, M. Makhiboroda, E. Gusev, M. Fomichev, A. Dedkova, P. Ivanin

Proceedings Volume 12157, 1215712 (2022) https://doi.org/10.1117/12.2623584

KEYWORDS: Semiconducting wafers, Wafer bonding, Silicon, Packaging, Adhesives, Manufacturing, Glasses, Standards development, Lithography, Transistors

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