Ms. Annalisa Pepe
at STMicroelectronics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Diffraction, Lithographic illumination, Scanners, Photomasks, Nanoimprint lithography, Semiconducting wafers, Binary data, Edge roughness, Resolution enhancement technologies

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Monochromatic aberrations, Visualization, Scanners, Printing, Photomasks, Optical proximity correction, Spherical lenses, Binary data, Resolution enhancement technologies

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