Ms. Annalisa Pepe Profile

Annalisa Pepe

at STMicroelectronics

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Publications (2)

Proceedings Article | 28 May 2004 Paper

Evaluation of IDEALSmile for 90-nm FLASH memory contact holes imaging with ArF scanner

Pietro Cantu, Gianfranco Capetti, Sara Loi, Marco Lupo, Annalisa Pepe, Kenji Saitoh, Kenji Yamazoe, Yasuo Hasegawa, Junji Iwasa, Olivier Toublan

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534065

KEYWORDS: Monochromatic aberrations, Printing, Photomasks, Optical proximity correction, Scanners, Binary data, Resolution enhancement technologies, Lithography, Spherical lenses, Visualization

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Proceedings Article | 28 May 2004 Paper

Customized illumination schemes for critical layers of 90-nm node dense memory devices in ArF lithography: comparison between simulation and experimental results

Gianfranco Capetti, Maddalena Bollin, Annalisa Pepe, Gina Cotti, Sara Loi, Umberto Iessi

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.533707

KEYWORDS: Diffraction, Binary data, Photomasks, Lithographic illumination, Lithography, Nanoimprint lithography, Scanners, Semiconducting wafers, Resolution enhancement technologies, Edge roughness

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